Global shape reconstruction of nano grid with singly fixed camera

doi:10.1007/s11431-010-4285-9

IMR OpenIR

	Global shape reconstruction of nano grid with singly fixed camera
	Wei YangJie 1,2; Wu ChengDong 3; Dong ZaiLi 2
通讯作者	Wei YangJie(weiyangjie@sia.cn)
	2011-04-01
发表期刊	SCIENCE CHINA-TECHNOLOGICAL SCIENCES
ISSN	1674-7321
卷号	54 期号:4 页码:1044-1052
摘要	Depth from defocus (DFD), as a typical shape reconstruction method, has been widely researched in most recent years. However, all the existing DFD algorithms require at least two defocused images with different camera parameters. Unfortunately, in micro/nano manipulation, any change on visual sensor's parameters is absolutely forbidden. Therefore, a novel DFD method to reconstruct the shape of a nano grid on micro/nano scale is researched in this paper. First, the blurring imaging model is constructed with the relative blurring and the diffusion equation. Second, the relationship between depth and blurring is discussed from four aspects. Subsequently, depth measurement problem is transformed into an optimization issue which is solved using the gradient flow algorithm. Finally, experiment results and error analysis are conducted to show the feasibility and effectiveness of the proposed method.
关键词	depth from defocus diffusion equation shape reconstruction nano grid
资助者	CAS FEA
DOI	10.1007/s11431-010-4285-9
收录类别	SCI
语种	英语
资助项目	CAS FEA
WOS研究方向	Engineering ; Materials Science
WOS类目	Engineering, Multidisciplinary ; Materials Science, Multidisciplinary
WOS记录号	WOS:000289736900035
出版者	SCIENCE CHINA PRESS
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/106042
专题	中国科学院金属研究所
通讯作者	Wei YangJie
作者单位	1.Chinese Acad Sci, Grad Sch Chinese Acad Sci, Shenyang 110016, Peoples R China 2.Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China 3.Northeast Univ, Sch Informat Sci & Engn, Shenyang 110004, Peoples R China
推荐引用方式 GB/T 7714	Wei YangJie,Wu ChengDong,Dong ZaiLi. Global shape reconstruction of nano grid with singly fixed camera[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2011,54(4):1044-1052.
APA	Wei YangJie,Wu ChengDong,&Dong ZaiLi.(2011).Global shape reconstruction of nano grid with singly fixed camera.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,54(4),1044-1052.
MLA	Wei YangJie,et al."Global shape reconstruction of nano grid with singly fixed camera".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 54.4(2011):1044-1052.