IMR OpenIR
Simulations of temperature field in HFCVD diamond films with large area
Wang, AY; Sun, C; Wang, B; Gong, J; Huang, RF; Wen, LS
Corresponding AuthorWang, AY()
2001-11-18
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume37Issue:11Pages:1217-1222
AbstractNumerical simulations were used to investigate the influence of various hot filaments and other deposition parameters on substrate temperature field which affects significantly the growth and quality of diamond films by hot-filament chemical vapor deposition (HFCVD). It was found that the homogenous substrate temperature region 76 mm x 76 min with the maximum temperature fluctuation no more than 5% could be obtained by a 80 mm x 80 mm filamentary heater and it could be improved to 100 mm x 100 mm under the condition of supplementary hot filaments with appropriate parameters. All of these theoretical results provided the basis for optimizing the technological parameters to deposit high quality and uniform diamond films over large area.
KeywordHFCVD diamond films temperature field simulation
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000172839900018
PublisherSCIENCE CHINA PRESS
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/112891
Collection中国科学院金属研究所
Corresponding AuthorWang, AY
AffiliationChinese Acad Sci, Met Res Inst, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Wang, AY,Sun, C,Wang, B,et al. Simulations of temperature field in HFCVD diamond films with large area[J]. ACTA METALLURGICA SINICA,2001,37(11):1217-1222.
APA Wang, AY,Sun, C,Wang, B,Gong, J,Huang, RF,&Wen, LS.(2001).Simulations of temperature field in HFCVD diamond films with large area.ACTA METALLURGICA SINICA,37(11),1217-1222.
MLA Wang, AY,et al."Simulations of temperature field in HFCVD diamond films with large area".ACTA METALLURGICA SINICA 37.11(2001):1217-1222.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Wang, AY]'s Articles
[Sun, C]'s Articles
[Wang, B]'s Articles
Baidu academic
Similar articles in Baidu academic
[Wang, AY]'s Articles
[Sun, C]'s Articles
[Wang, B]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Wang, AY]'s Articles
[Sun, C]'s Articles
[Wang, B]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.