| Simulations of temperature field in HFCVD diamond films with large area | |
| Wang, AY; Sun, C; Wang, B; Gong, J; Huang, RF; Wen, LS | |
| Corresponding Author | Wang, AY() |
| 2001-11-18 | |
| Source Publication | ACTA METALLURGICA SINICA
 |
| ISSN | 0412-1961 |
| Volume | 37Issue:11Pages:1217-1222 |
| Abstract | Numerical simulations were used to investigate the influence of various hot filaments and other deposition parameters on substrate temperature field which affects significantly the growth and quality of diamond films by hot-filament chemical vapor deposition (HFCVD). It was found that the homogenous substrate temperature region 76 mm x 76 min with the maximum temperature fluctuation no more than 5% could be obtained by a 80 mm x 80 mm filamentary heater and it could be improved to 100 mm x 100 mm under the condition of supplementary hot filaments with appropriate parameters. All of these theoretical results provided the basis for optimizing the technological parameters to deposit high quality and uniform diamond films over large area. |
| Keyword | HFCVD diamond films temperature field simulation |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Metallurgy & Metallurgical Engineering |
| WOS Subject | Metallurgy & Metallurgical Engineering |
| WOS ID | WOS:000172839900018 |
| Publisher | SCIENCE CHINA PRESS |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/112895 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Wang, AY |
| Affiliation | Chinese Acad Sci, Met Res Inst, Shenyang 110016, Peoples R China |
| Recommended Citation GB/T 7714 | Wang, AY,Sun, C,Wang, B,et al. Simulations of temperature field in HFCVD diamond films with large area[J]. ACTA METALLURGICA SINICA,2001,37(11):1217-1222. |
| APA | Wang, AY,Sun, C,Wang, B,Gong, J,Huang, RF,&Wen, LS.(2001).Simulations of temperature field in HFCVD diamond films with large area.ACTA METALLURGICA SINICA,37(11),1217-1222. |
| MLA | Wang, AY,et al."Simulations of temperature field in HFCVD diamond films with large area".ACTA METALLURGICA SINICA 37.11(2001):1217-1222. |
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