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Effect of internal stress on growth texture of metallic thin films
Zhou, L; Zhou, NG; Zhu, SL
Corresponding AuthorZhou, L()
2002-08-01
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume38Issue:8Pages:795-798
AbstractMolecular dynamics simulations of depositional growth processes of polycrystalline metal thin films have been carried out, in which an FS type embedded atom method (EAM) potential was used. With a preset fixed strain, a uniaxial internal compressive stress was introduced during the film growth, and the effect of internal stress on development of growth texture of thin films was simulated. The results show that internal stress does significantly affect the orientation preference of the grains in films. The stress-induced preferential development of the favored grain starts at the deposition surface and expands by consuming its neighboring grains. Under fixed compressive strain, the grains, of which the close packing direction orients away from the compressing axis, grow preferentially. The simulation has also revealed a critical feature in kinetics of such stress-induced texturing versus film thickness. Local twinning was found to occur in the shrinking grain, and the twin soon transferred to the structure of the expanding grain. After the expansion completed, a mismatch dislocation may be left at where the shrinking grain disappears.
Keywordmetal film texture molecular dynamics
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000177977000002
PublisherSCIENCE CHINA PRESS
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/113863
Collection中国科学院金属研究所
Corresponding AuthorZhou, L
Affiliation1.Nanchang Univ, Sch Chem & Mat Sci, Nanchang 330047, Peoples R China
2.Chinese Acad Sci, Inst Met Res, State Key Lab Corros & Protect, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Zhou, L,Zhou, NG,Zhu, SL. Effect of internal stress on growth texture of metallic thin films[J]. ACTA METALLURGICA SINICA,2002,38(8):795-798.
APA Zhou, L,Zhou, NG,&Zhu, SL.(2002).Effect of internal stress on growth texture of metallic thin films.ACTA METALLURGICA SINICA,38(8),795-798.
MLA Zhou, L,et al."Effect of internal stress on growth texture of metallic thin films".ACTA METALLURGICA SINICA 38.8(2002):795-798.
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