Effect of internal stress on growth texture of metallic thin films | |
Zhou, L; Zhou, NG; Zhu, SL | |
Corresponding Author | Zhou, L() |
2002-08-01 | |
Source Publication | ACTA METALLURGICA SINICA
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ISSN | 0412-1961 |
Volume | 38Issue:8Pages:795-798 |
Abstract | Molecular dynamics simulations of depositional growth processes of polycrystalline metal thin films have been carried out, in which an FS type embedded atom method (EAM) potential was used. With a preset fixed strain, a uniaxial internal compressive stress was introduced during the film growth, and the effect of internal stress on development of growth texture of thin films was simulated. The results show that internal stress does significantly affect the orientation preference of the grains in films. The stress-induced preferential development of the favored grain starts at the deposition surface and expands by consuming its neighboring grains. Under fixed compressive strain, the grains, of which the close packing direction orients away from the compressing axis, grow preferentially. The simulation has also revealed a critical feature in kinetics of such stress-induced texturing versus film thickness. Local twinning was found to occur in the shrinking grain, and the twin soon transferred to the structure of the expanding grain. After the expansion completed, a mismatch dislocation may be left at where the shrinking grain disappears. |
Keyword | metal film texture molecular dynamics |
Indexed By | SCI |
Language | 英语 |
WOS Research Area | Metallurgy & Metallurgical Engineering |
WOS Subject | Metallurgy & Metallurgical Engineering |
WOS ID | WOS:000177977000002 |
Publisher | SCIENCE CHINA PRESS |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.imr.ac.cn/handle/321006/113863 |
Collection | 中国科学院金属研究所 |
Corresponding Author | Zhou, L |
Affiliation | 1.Nanchang Univ, Sch Chem & Mat Sci, Nanchang 330047, Peoples R China 2.Chinese Acad Sci, Inst Met Res, State Key Lab Corros & Protect, Shenyang 110016, Peoples R China |
Recommended Citation GB/T 7714 | Zhou, L,Zhou, NG,Zhu, SL. Effect of internal stress on growth texture of metallic thin films[J]. ACTA METALLURGICA SINICA,2002,38(8):795-798. |
APA | Zhou, L,Zhou, NG,&Zhu, SL.(2002).Effect of internal stress on growth texture of metallic thin films.ACTA METALLURGICA SINICA,38(8),795-798. |
MLA | Zhou, L,et al."Effect of internal stress on growth texture of metallic thin films".ACTA METALLURGICA SINICA 38.8(2002):795-798. |
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