Effect of internal stress on growth texture of metallic thin films

IMR OpenIR

	Effect of internal stress on growth texture of metallic thin films
	Zhou, L ; Zhou, NG ; Zhu, SL
通讯作者	Zhou, L()
	2002-08-01
发表期刊	ACTA METALLURGICA SINICA
ISSN	0412-1961
卷号	38 期号:8 页码:795-798
摘要	Molecular dynamics simulations of depositional growth processes of polycrystalline metal thin films have been carried out, in which an FS type embedded atom method (EAM) potential was used. With a preset fixed strain, a uniaxial internal compressive stress was introduced during the film growth, and the effect of internal stress on development of growth texture of thin films was simulated. The results show that internal stress does significantly affect the orientation preference of the grains in films. The stress-induced preferential development of the favored grain starts at the deposition surface and expands by consuming its neighboring grains. Under fixed compressive strain, the grains, of which the close packing direction orients away from the compressing axis, grow preferentially. The simulation has also revealed a critical feature in kinetics of such stress-induced texturing versus film thickness. Local twinning was found to occur in the shrinking grain, and the twin soon transferred to the structure of the expanding grain. After the expansion completed, a mismatch dislocation may be left at where the shrinking grain disappears.
关键词	metal film texture molecular dynamics
收录类别	SCI
语种	英语
WOS研究方向	Metallurgy & Metallurgical Engineering
WOS类目	Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000177977000002
出版者	SCIENCE CHINA PRESS
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/113863
专题	中国科学院金属研究所
通讯作者	Zhou, L
作者单位	1.Nanchang Univ, Sch Chem & Mat Sci, Nanchang 330047, Peoples R China 2.Chinese Acad Sci, Inst Met Res, State Key Lab Corros & Protect, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Zhou, L,Zhou, NG,Zhu, SL. Effect of internal stress on growth texture of metallic thin films[J]. ACTA METALLURGICA SINICA,2002,38(8):795-798.
APA	Zhou, L,Zhou, NG,&Zhu, SL.(2002).Effect of internal stress on growth texture of metallic thin films.ACTA METALLURGICA SINICA,38(8),795-798.
MLA	Zhou, L,et al."Effect of internal stress on growth texture of metallic thin films".ACTA METALLURGICA SINICA 38.8(2002):795-798.