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A new application of pulsed laser deposition to produce functional graded material thin films
Wang, Y; Chen, M; Qi, LZ; Liu, ZL; Yao, KL; Wang, QL
Corresponding AuthorWang, Y()
2003
Source PublicationFUNCTIONALLY GRADED MATERIALS VII
ISSN0255-5476
Volume423-4Pages:573-575
AbstractA new fabricating method of functional graded material (FGM) thin films characterized by continuous component distribution, based on dual-beam pulse laser deposition, was proposed in this paper. A controlled lens system splits one beam laser from one excimer laser into two beams, which are focused on two different targets in a depositing chamber, respectively. Two plasma plumes mix and deposit together on same substrate. The component of thin film changes as the intensity ratio of two beams changes. Therefore, FGM thin films with continuous graded component, instead of stepped gradient, are obtained. This method has great advantages especially for very thin FGM films, also a great potential for fabrication of composite thin films.
Keyworddual-beam laser deposition functional graded thin film composite thin film
Indexed BySCI
Language英语
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Multidisciplinary
WOS IDWOS:000183317500115
PublisherTRANS TECH PUBLICATIONS LTD
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/117623
Collection中国科学院金属研究所
Corresponding AuthorWang, Y
Affiliation1.Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China
2.Huazhong Univ Sci & Technol, State Key Lab Laser Technol, Wuhan 430074, Peoples R China
3.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China
Recommended Citation
GB/T 7714
Wang, Y,Chen, M,Qi, LZ,et al. A new application of pulsed laser deposition to produce functional graded material thin films[J]. FUNCTIONALLY GRADED MATERIALS VII,2003,423-4:573-575.
APA Wang, Y,Chen, M,Qi, LZ,Liu, ZL,Yao, KL,&Wang, QL.(2003).A new application of pulsed laser deposition to produce functional graded material thin films.FUNCTIONALLY GRADED MATERIALS VII,423-4,573-575.
MLA Wang, Y,et al."A new application of pulsed laser deposition to produce functional graded material thin films".FUNCTIONALLY GRADED MATERIALS VII 423-4(2003):573-575.
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