A new application of pulsed laser deposition to produce functional graded material thin films

IMR OpenIR

	A new application of pulsed laser deposition to produce functional graded material thin films
	Wang, Y ; Chen, M ; Qi, LZ ; Liu, ZL ; Yao, KL ; Wang, QL
通讯作者	Wang, Y()
	2003
发表期刊	FUNCTIONALLY GRADED MATERIALS VII
ISSN	0255-5476
卷号	423-4 页码:573-575
摘要	A new fabricating method of functional graded material (FGM) thin films characterized by continuous component distribution, based on dual-beam pulse laser deposition, was proposed in this paper. A controlled lens system splits one beam laser from one excimer laser into two beams, which are focused on two different targets in a depositing chamber, respectively. Two plasma plumes mix and deposit together on same substrate. The component of thin film changes as the intensity ratio of two beams changes. Therefore, FGM thin films with continuous graded component, instead of stepped gradient, are obtained. This method has great advantages especially for very thin FGM films, also a great potential for fabrication of composite thin films.
关键词	dual-beam laser deposition functional graded thin film composite thin film
收录类别	SCI
语种	英语
WOS研究方向	Materials Science
WOS类目	Materials Science, Multidisciplinary
WOS记录号	WOS:000183317500115
出版者	TRANS TECH PUBLICATIONS LTD
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/117623
专题	中国科学院金属研究所
通讯作者	Wang, Y
作者单位	1.Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China 2.Huazhong Univ Sci & Technol, State Key Lab Laser Technol, Wuhan 430074, Peoples R China 3.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China
推荐引用方式 GB/T 7714	Wang, Y,Chen, M,Qi, LZ,et al. A new application of pulsed laser deposition to produce functional graded material thin films[J]. FUNCTIONALLY GRADED MATERIALS VII,2003,423-4:573-575.
APA	Wang, Y,Chen, M,Qi, LZ,Liu, ZL,Yao, KL,&Wang, QL.(2003).A new application of pulsed laser deposition to produce functional graded material thin films.FUNCTIONALLY GRADED MATERIALS VII,423-4,573-575.
MLA	Wang, Y,et al."A new application of pulsed laser deposition to produce functional graded material thin films".FUNCTIONALLY GRADED MATERIALS VII 423-4(2003):573-575.