| A new application of pulsed laser deposition to produce functional graded material thin films | |
| Wang, Y; Chen, M; Qi, LZ; Liu, ZL; Yao, KL; Wang, QL | |
| Corresponding Author | Wang, Y() |
| 2003 | |
| Source Publication | FUNCTIONALLY GRADED MATERIALS VII
 |
| ISSN | 0255-5476 |
| Volume | 423-4Pages:573-575 |
| Abstract | A new fabricating method of functional graded material (FGM) thin films characterized by continuous component distribution, based on dual-beam pulse laser deposition, was proposed in this paper. A controlled lens system splits one beam laser from one excimer laser into two beams, which are focused on two different targets in a depositing chamber, respectively. Two plasma plumes mix and deposit together on same substrate. The component of thin film changes as the intensity ratio of two beams changes. Therefore, FGM thin films with continuous graded component, instead of stepped gradient, are obtained. This method has great advantages especially for very thin FGM films, also a great potential for fabrication of composite thin films. |
| Keyword | dual-beam laser deposition functional graded thin film composite thin film |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Multidisciplinary |
| WOS ID | WOS:000183317500115 |
| Publisher | TRANS TECH PUBLICATIONS LTD |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/117623 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Wang, Y |
| Affiliation | 1.Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China 2.Huazhong Univ Sci & Technol, State Key Lab Laser Technol, Wuhan 430074, Peoples R China 3.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China |
| Recommended Citation GB/T 7714 | Wang, Y,Chen, M,Qi, LZ,et al. A new application of pulsed laser deposition to produce functional graded material thin films[J]. FUNCTIONALLY GRADED MATERIALS VII,2003,423-4:573-575. |
| APA | Wang, Y,Chen, M,Qi, LZ,Liu, ZL,Yao, KL,&Wang, QL.(2003).A new application of pulsed laser deposition to produce functional graded material thin films.FUNCTIONALLY GRADED MATERIALS VII,423-4,573-575. |
| MLA | Wang, Y,et al."A new application of pulsed laser deposition to produce functional graded material thin films".FUNCTIONALLY GRADED MATERIALS VII 423-4(2003):573-575. |
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