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Mechanism of effect of bias on morphologies of films prepared by arc ion plating
Huang, MD; Lin, GQ; Dong, C; Sun, C; Wen, LS
Corresponding AuthorHuang, MD()
2003-05-11
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume39Issue:5Pages:510-515
AbstractThis paper studies the mechanism of macroparticles(MPs) contamination of TiN films obtained by arc ion plating(AIP) under different biases modes. The effect of bias has been analyzed from the viewpoint of plasma physics. It is shown that MPs are affected by bias through the repulsive force from the negatively biased substrate. MPs are easily charged by electrons under pulsed bias because they repeatedly move in and out of the oscillating plasma sheath. In dc bias, the plasma sheath is almost stable and its charging effect is weak. Thus the repulsive force from the substrate under pulsed biases is higher than that under dc ones, resulting in obvious reduction of the MPs amount.
Keywordbias arc ion plating TiN thin film morphology
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000183358400009
PublisherSCIENCE CHINA PRESS
Citation statistics
Cited Times:10[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/117992
Collection中国科学院金属研究所
Corresponding AuthorHuang, MD
Affiliation1.Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Huang, MD,Lin, GQ,Dong, C,et al. Mechanism of effect of bias on morphologies of films prepared by arc ion plating[J]. ACTA METALLURGICA SINICA,2003,39(5):510-515.
APA Huang, MD,Lin, GQ,Dong, C,Sun, C,&Wen, LS.(2003).Mechanism of effect of bias on morphologies of films prepared by arc ion plating.ACTA METALLURGICA SINICA,39(5),510-515.
MLA Huang, MD,et al."Mechanism of effect of bias on morphologies of films prepared by arc ion plating".ACTA METALLURGICA SINICA 39.5(2003):510-515.
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