| Analysis and calculation of forces on macroparticles in plasma sheath | |
| Guo, HM; Lin, GQ; Sheng, MY; Wang, DZ; Dong, C; Wen, LS | |
| Corresponding Author | Lin, GQ() |
| 2004-10-11 | |
| Source Publication | ACTA METALLURGICA SINICA
 |
| ISSN | 0412-1961 |
| Volume | 40Issue:10Pages:1064-1068 |
| Abstract | Applying the plasma sheath models given by Edlberg and Aydil, the charging effect and forces acting on macroparticles are analyzed and calculated in pulsed-bias arc ion plating, which gives an evidence to the experimental phenomenon and physical model in which macroparticles would be repulsed from electric force and hence are significantly reduced. |
| Keyword | macroparticle arc ion plating pulsed bias plasma sheath force analysis |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Metallurgy & Metallurgical Engineering |
| WOS Subject | Metallurgy & Metallurgical Engineering |
| WOS ID | WOS:000224871300011 |
| Publisher | SCIENCE CHINA PRESS |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/119815 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Lin, GQ |
| Affiliation | 1.Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China 2.Dalian Univ Technol, Dept Phys, Dalian 116024, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China |
| Recommended Citation GB/T 7714 | Guo, HM,Lin, GQ,Sheng, MY,et al. Analysis and calculation of forces on macroparticles in plasma sheath[J]. ACTA METALLURGICA SINICA,2004,40(10):1064-1068. |
| APA | Guo, HM,Lin, GQ,Sheng, MY,Wang, DZ,Dong, C,&Wen, LS.(2004).Analysis and calculation of forces on macroparticles in plasma sheath.ACTA METALLURGICA SINICA,40(10),1064-1068. |
| MLA | Guo, HM,et al."Analysis and calculation of forces on macroparticles in plasma sheath".ACTA METALLURGICA SINICA 40.10(2004):1064-1068. |
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