Polymer MEMS actuators for underwater micromanipulation

doi:10.1109/TMECH.2004.828652

IMR OpenIR

	Polymer MEMS actuators for underwater micromanipulation
	Zhou, JWL ; Chan, HY ; To, TKH ; Lai, KWC ; Li, WJ
通讯作者	Zhou, JWL()
	2004-06-01
发表期刊	IEEE-ASME TRANSACTIONS ON MECHATRONICS
ISSN	1083-4435
卷号	9 期号:2 页码:334-342
摘要	Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.
关键词	cellular grippers micro manipulation micro polymer actuators polymer MEMS actuators
DOI	10.1109/TMECH.2004.828652
收录类别	SCI
语种	英语
WOS研究方向	Automation & Control Systems ; Engineering
WOS类目	Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical
WOS记录号	WOS:000222256500004
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
引用统计	被引频次：100[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/126071
专题	中国科学院金属研究所
通讯作者	Zhou, JWL
作者单位	1.Chinese Univ Hong Kong, Ctr Micro & Nano Syst, Shatin, Hong Kong, Peoples R China 2.Chinese Acad Sci, Micro & Nano Automat Lab, Shenyang, Liaoning, Peoples R China
推荐引用方式 GB/T 7714	Zhou, JWL,Chan, HY,To, TKH,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2004,9(2):334-342.
APA	Zhou, JWL,Chan, HY,To, TKH,Lai, KWC,&Li, WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE-ASME TRANSACTIONS ON MECHATRONICS,9(2),334-342.
MLA	Zhou, JWL,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE-ASME TRANSACTIONS ON MECHATRONICS 9.2(2004):334-342.