| Polymer MEMS actuators for underwater micromanipulation | |
| Zhou, JWL; Chan, HY; To, TKH; Lai, KWC; Li, WJ | |
| Corresponding Author | Zhou, JWL() |
| 2004-06-01 | |
| Source Publication | IEEE-ASME TRANSACTIONS ON MECHATRONICS
 |
| ISSN | 1083-4435 |
| Volume | 9Issue:2Pages:334-342 |
| Abstract | Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper. |
| Keyword | cellular grippers micro manipulation micro polymer actuators polymer MEMS actuators |
| DOI | 10.1109/TMECH.2004.828652 |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Automation & Control Systems ; Engineering |
| WOS Subject | Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical |
| WOS ID | WOS:000222256500004 |
| Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/126073 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Zhou, JWL |
| Affiliation | 1.Chinese Univ Hong Kong, Ctr Micro & Nano Syst, Shatin, Hong Kong, Peoples R China 2.Chinese Acad Sci, Micro & Nano Automat Lab, Shenyang, Liaoning, Peoples R China |
| Recommended Citation GB/T 7714 | Zhou, JWL,Chan, HY,To, TKH,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2004,9(2):334-342. |
| APA | Zhou, JWL,Chan, HY,To, TKH,Lai, KWC,&Li, WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE-ASME TRANSACTIONS ON MECHATRONICS,9(2),334-342. |
| MLA | Zhou, JWL,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE-ASME TRANSACTIONS ON MECHATRONICS 9.2(2004):334-342. |
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