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Monte Carlo simulation of gas free molecular flow in turbo molecular pump's inlet tube
Sun, Kun1; Zhang, Shiwei1; Li, Yajie1; Zhang, Zhijun1; Li, Haitao1; Mu, Ruyi2
通讯作者Zhang, Shiwei(zhangsw-neu@163.com)
2018
发表期刊MOLECULAR SIMULATION
ISSN0892-7022
卷号44期号:15页码:1261-1269
摘要Due to the beaming effect of inlet tube and reflection effect of turbine cover in the turbo molecular pump, the positional and angular distribution of incident gas molecules (IGM) on the turbine blades would no longer be uniformly distributed. Based on the test particle Monte Caro method, a new self-defining procedure is proposed and it can be more accurate to describe the status of IGM into turbine blades. The results show that the influence of rotor speed on the transmission probability is indistinctive. Meanwhile, the incident density between the tip and root of the blades is distinct. The positional beaming effect and the angular beaming effect are enhanced with the lengthening of the tube and less molecule diverge towards the tube wall. The positive transmission probability of first-stage turbine blades using our new method is different from those obeying the cosine distribution under the same number of incident molecules. The calculation results of new method verified by another procedure are reasonable and accurate.
关键词Monte Carlo simulation turbo molecular pump inlet tube free molecular flow
DOI10.1080/08927022.2018.1485151
收录类别SCI
语种英语
WOS研究方向Chemistry ; Physics
WOS类目Chemistry, Physical ; Physics, Atomic, Molecular & Chemical
WOS记录号WOS:000441735700012
出版者TAYLOR & FRANCIS LTD
引用统计
被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/129118
专题中国科学院金属研究所
通讯作者Zhang, Shiwei
作者单位1.Northeastern Univ, Sch Mech Engn & Automat, Shenyang, Liaoning, Peoples R China
2.Chinese Acad Sci, Shenyang Inst Automat, Shenyang, Liaoning, Peoples R China
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GB/T 7714
Sun, Kun,Zhang, Shiwei,Li, Yajie,et al. Monte Carlo simulation of gas free molecular flow in turbo molecular pump's inlet tube[J]. MOLECULAR SIMULATION,2018,44(15):1261-1269.
APA Sun, Kun,Zhang, Shiwei,Li, Yajie,Zhang, Zhijun,Li, Haitao,&Mu, Ruyi.(2018).Monte Carlo simulation of gas free molecular flow in turbo molecular pump's inlet tube.MOLECULAR SIMULATION,44(15),1261-1269.
MLA Sun, Kun,et al."Monte Carlo simulation of gas free molecular flow in turbo molecular pump's inlet tube".MOLECULAR SIMULATION 44.15(2018):1261-1269.
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