Effect of Substrate Pulse Bias Voltage on the Microstructure and Mechanical and Wear-resistant Properties of TiN/Cu Nanocomposite Films

IMR OpenIR

	Effect of Substrate Pulse Bias Voltage on the Microstructure and Mechanical and Wear-resistant Properties of TiN/Cu Nanocomposite Films
	Zhao Yanhui 1; Zhao Shengsheng 2; Ren Ling 1; Denisov, V. V.3; Koval, N. N.3; Yang Ke 1; Yu Baohai 1
通讯作者	Zhao Yanhui(yhzhao@imr.ac.cn)
	2018-11-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	47 期号:11 页码:3284-3288
摘要	TiN/Cu nanocomposite films were deposited on high-speed steel (HSS) substrates by axial magnetic field-enhanced arc ion plating (AMFE-AIP). The effects of substrate bias voltage on chemical composition, microstructure, mechanical and tribological properties of the films were investigated by X-ray photoelectrons spectroscopy (XPS), X-ray diffraction (XRD), nanoindentation and wear measurements, respectively. The results show that the Cu content increases first and then decreases with the increase of the pulse bias voltage, being a low value in the range of 1.3 at%similar to 2.1 at%. XRD results show that only the TiN phase appears in all the films, and no Cu phase is observed. The preferred orientation of the films changes significantly with the increasing pulse bias voltage. A maximum value of hardness of 36 GPa is obtained under a pulse bias voltage of -200 V, corresponding to the film containing 1.6 at% Cu. Compared to the pure TiN film, the Cu addition in TiN films significantly improves the wear resistance.
关键词	arc ion plating magnetic field pulse bias microstructure mechanical property
资助者	National Natural Science Foundation of China
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[51401128]
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000452694200006
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/130756
专题	中国科学院金属研究所
通讯作者	Zhao Yanhui
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China 2.Shenzhen Polytech, Sch Mech & Elect Engn, Shenzhen 518055, Peoples R China 3.Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk 634055, Russia
推荐引用方式 GB/T 7714	Zhao Yanhui,Zhao Shengsheng,Ren Ling,et al. Effect of Substrate Pulse Bias Voltage on the Microstructure and Mechanical and Wear-resistant Properties of TiN/Cu Nanocomposite Films[J]. RARE METAL MATERIALS AND ENGINEERING,2018,47(11):3284-3288.
APA	Zhao Yanhui.,Zhao Shengsheng.,Ren Ling.,Denisov, V. V..,Koval, N. N..,...&Yu Baohai.(2018).Effect of Substrate Pulse Bias Voltage on the Microstructure and Mechanical and Wear-resistant Properties of TiN/Cu Nanocomposite Films.RARE METAL MATERIALS AND ENGINEERING,47(11),3284-3288.
MLA	Zhao Yanhui,et al."Effect of Substrate Pulse Bias Voltage on the Microstructure and Mechanical and Wear-resistant Properties of TiN/Cu Nanocomposite Films".RARE METAL MATERIALS AND ENGINEERING 47.11(2018):3284-3288.