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Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering
Wang Mei-Han1; Wen Jia-Xing1; Chen Yun1; Lei Hao2
Corresponding AuthorWang Mei-Han(wangmhdicp@aliyun.com)
2018-12-20
Source PublicationJOURNAL OF INORGANIC MATERIALS
ISSN1000-324X
Volume33Issue:12Pages:1303-1308
AbstractNano-structured tungsten oxide (WO3) thin films were deposited at room temperature by glancing angle reactive magnetron sputtering and then annealed at 450 degrees C in air. The films were characterized by field-emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD). The WO3 thin film deposited by DC magnetron sputtering at 80 degrees glancing angle exhibited oblique nano-column structure, while deposited by pulsed DC magnetron sputtering at the same angle exhibits nano-pore structure. After annealing at 450 degrees C for 3 h, the oblique nanocolums are conjunct with each other but the nano-pore structured remains with bigger pore size. XRD analysis reveals that WO3 thin films deposited at room temperature demonstrate amorphous structure. The amorphous structure will transfers to monoclinic phase after annealing at 450 degrees C for 1 h. Transmittance difference between colorization and bleaching of nano-structured WO3 thin film reaches 60% at wavelength of 600 nm. Electrochromic properties of nano-structured WO3 thin films are highly reversible.
KeywordWO3 thin films nano-structured glancing angle magnetron sputtering
Funding OrganizationNational Natural Science Foundation of China ; Program for Liaoning Excellent Talents in University
DOI10.15541/jim20180130
Indexed BySCI
Language英语
Funding ProjectNational Natural Science Foundation of China[51302175] ; Program for Liaoning Excellent Talents in University[LJQ2014132]
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Ceramics
WOS IDWOS:000455987800005
PublisherSCIENCE PRESS
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/131134
Collection中国科学院金属研究所
Corresponding AuthorWang Mei-Han
Affiliation1.Shenyang Univ, Sch Mech Engn, Shenyang 110044, Liaoning, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Surface Engn Mat Div, Shenyang 110016, Liaoning, Peoples R China
Recommended Citation
GB/T 7714
Wang Mei-Han,Wen Jia-Xing,Chen Yun,et al. Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering[J]. JOURNAL OF INORGANIC MATERIALS,2018,33(12):1303-1308.
APA Wang Mei-Han,Wen Jia-Xing,Chen Yun,&Lei Hao.(2018).Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering.JOURNAL OF INORGANIC MATERIALS,33(12),1303-1308.
MLA Wang Mei-Han,et al."Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering".JOURNAL OF INORGANIC MATERIALS 33.12(2018):1303-1308.
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