The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure

doi:10.1016/j.surfcoat.2018.12.046

IMR OpenIR

	The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure
	Song, Gui-hong 1; Liu, Qian-Nan 1; Du, Hao 2; Hu, Fang 1; Wang, Chao 1; He, Chun-lin 3
通讯作者	Song, Gui-hong(ghsongsut@126.com)
	2019-02-15
发表期刊	SURFACE & COATINGS TECHNOLOGY
ISSN	0257-8972
卷号	359 页码:252-257
摘要	The Mg-2(Si,Sn) solid solutions films have been deposited on single crystalline Si(111) substrates under temperatures from 130 to 400 degrees C by magnetron sputtering using a Mg-Si-Sn alloy target. The phase components, microstructures and the thermoelectric properties of these films were investigated. It is indicated that the films deposited under lower temperature ( <= 300 degrees C) possess a cubic anti-fluorite structure phase and their structures transform into orthorhombic and hexagonal with the increasing temperature to 400 degrees C. Meanwhile, the tetragonal structure metal Sn phase occurs on samples deposited under temperatures of 350 degrees C and 400 degrees C. Furthermore, the film deposited under 350 degrees C is composed of cubic anti-fluorite structure and orthorhombic structure phase, and possesses the highest absolute value of Seebeck coefficient and the highest electrical resistivity. On the other hand, the film deposited under 130 degrees C which is composed of only cubic anti-fluorite structure possesses the highest power factor at all measured temperature due to higher absolute value of Seebeck coefficient and lower electrical resistivity. It is suggested that the Mg-2(Si,Sn) solid solutions film with cubic phase structure has higher power factor than that with orthorhombic and hexagonal phase structure.
关键词	Mg-Sn-Si film Thermoelectric property Seebeck coefficient Cubic phase Magnetron sputtering
资助者	National Natural Science Foundation of China
DOI	10.1016/j.surfcoat.2018.12.046
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[51772193]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Coatings & Films ; Physics, Applied
WOS记录号	WOS:000457662700031
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/131708
专题	中国科学院金属研究所
通讯作者	Song, Gui-hong
作者单位	1.Shenyang Univ Technol, Sch Mat Sci & Technol, Shenyang 110870, Liaoning, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Div Surface Engn Mat, Shenyang 110016, Liaoning, Peoples R China 3.Shenyang Univ, Liaoning Prov Key Lab Adv Mat, Shenyang 110044, Liaoning, Peoples R China
推荐引用方式 GB/T 7714	Song, Gui-hong,Liu, Qian-Nan,Du, Hao,et al. The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure[J]. SURFACE & COATINGS TECHNOLOGY,2019,359:252-257.
APA	Song, Gui-hong,Liu, Qian-Nan,Du, Hao,Hu, Fang,Wang, Chao,&He, Chun-lin.(2019).The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure.SURFACE & COATINGS TECHNOLOGY,359,252-257.
MLA	Song, Gui-hong,et al."The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure".SURFACE & COATINGS TECHNOLOGY 359(2019):252-257.