Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films | |
Guo, Chaoqian1; Pei, Zhiliang2; Gong, Jun2; Sun, Chao2; Lin, Songsheng1; Shi, Qian1 | |
Corresponding Author | Pei, Zhiliang(zlpei@imr.ac.cn) ; Sun, Chao(csun@imr.ac.cn) |
2019-02-01 | |
Source Publication | DIAMOND AND RELATED MATERIALS
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ISSN | 0925-9635 |
Volume | 92Pages:187-197 |
Abstract | (Cr, N)-DLC/DLC multilayer films with different bilayer numbers and thickness ratios were prepared on cemented carbides and silicon wafers by cathodic vacuum arc technology. Surface and cross-section morphologies of multilayer films were observed by scanning electron microscope. Roughness, hardness, adhesion strength, friction coefficient and wear rates of the deposited films were investigated by surface profiler, nanoindentor, scratch tester, and ball-on-disk tribometer, respectively. Alternating stress field from adjacent sublayers benefited the mechanical properties while macroparticles piercing through interfaces between sublayers provided passages for cracks propagation and deteriorated films' mechanical properties. As bilayer numbers varied from 10 to 20 average friction coefficient and roughness of multilayer films had the same changing trend and wear rates increased linearly from 2.45 x 10(-7) mm(3)/Nm to 3.81 x 10(-7) mm(3)/Nm. Improving proportion of (Cr, N)-DLC layer in multilayer films increased quantity of macroparticles, leading to the rise of multilayer films' roughness, average friction coefficient and wear rates. |
Keyword | Diamond-like carbon Multilayer Bilayer number Thickness ratio Properties Arc |
Funding Organization | GDAS' Project of Introducing Full-time Doctoral Degree Talent Support ; Science and Technology Program of Guangzhou ; Guangdong Science and Technology Program ; GDAS' Project of Science Technology Development |
DOI | 10.1016/j.diamond.2019.01.003 |
Indexed By | SCI |
Language | 英语 |
Funding Project | GDAS' Project of Introducing Full-time Doctoral Degree Talent Support[2018GDASCX-0948] ; Science and Technology Program of Guangzhou[201607010091] ; Guangdong Science and Technology Program[2017A070701027] ; GDAS' Project of Science Technology Development[2017GDASCX-0111] |
WOS Research Area | Materials Science ; Physics |
WOS Subject | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
WOS ID | WOS:000461129800025 |
Publisher | ELSEVIER SCIENCE SA |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.imr.ac.cn/handle/321006/132224 |
Collection | 中国科学院金属研究所 |
Corresponding Author | Pei, Zhiliang; Sun, Chao |
Affiliation | 1.Guangdong Inst New Mat, Key Lab Guangdong Modern Surface Engn Technol, Natl Engn Lab Modern Mat Surface Engn Technol, Guangzhou 510651, Guangdong, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China |
Recommended Citation GB/T 7714 | Guo, Chaoqian,Pei, Zhiliang,Gong, Jun,et al. Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films[J]. DIAMOND AND RELATED MATERIALS,2019,92:187-197. |
APA | Guo, Chaoqian,Pei, Zhiliang,Gong, Jun,Sun, Chao,Lin, Songsheng,&Shi, Qian.(2019).Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films.DIAMOND AND RELATED MATERIALS,92,187-197. |
MLA | Guo, Chaoqian,et al."Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films".DIAMOND AND RELATED MATERIALS 92(2019):187-197. |
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