Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films

doi:10.1016/j.diamond.2019.01.003

IMR OpenIR

	Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films
	Guo, Chaoqian 1; Pei, Zhiliang 2; Gong, Jun 2; Sun, Chao 2; Lin, Songsheng 1; Shi, Qian 1
通讯作者	Pei, Zhiliang(zlpei@imr.ac.cn) ; Sun, Chao(csun@imr.ac.cn)
	2019-02-01
发表期刊	DIAMOND AND RELATED MATERIALS
ISSN	0925-9635
卷号	92 页码:187-197
摘要	(Cr, N)-DLC/DLC multilayer films with different bilayer numbers and thickness ratios were prepared on cemented carbides and silicon wafers by cathodic vacuum arc technology. Surface and cross-section morphologies of multilayer films were observed by scanning electron microscope. Roughness, hardness, adhesion strength, friction coefficient and wear rates of the deposited films were investigated by surface profiler, nanoindentor, scratch tester, and ball-on-disk tribometer, respectively. Alternating stress field from adjacent sublayers benefited the mechanical properties while macroparticles piercing through interfaces between sublayers provided passages for cracks propagation and deteriorated films' mechanical properties. As bilayer numbers varied from 10 to 20 average friction coefficient and roughness of multilayer films had the same changing trend and wear rates increased linearly from 2.45 x 10(-7) mm(3)/Nm to 3.81 x 10(-7) mm(3)/Nm. Improving proportion of (Cr, N)-DLC layer in multilayer films increased quantity of macroparticles, leading to the rise of multilayer films' roughness, average friction coefficient and wear rates.
关键词	Diamond-like carbon Multilayer Bilayer number Thickness ratio Properties Arc
资助者	GDAS' Project of Introducing Full-time Doctoral Degree Talent Support ; Science and Technology Program of Guangzhou ; Guangdong Science and Technology Program ; GDAS' Project of Science Technology Development
DOI	10.1016/j.diamond.2019.01.003
收录类别	SCI
语种	英语
资助项目	GDAS' Project of Introducing Full-time Doctoral Degree Talent Support[2018GDASCX-0948] ; Science and Technology Program of Guangzhou[201607010091] ; Guangdong Science and Technology Program[2017A070701027] ; GDAS' Project of Science Technology Development[2017GDASCX-0111]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000461129800025
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：13[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/132224
专题	中国科学院金属研究所
通讯作者	Pei, Zhiliang; Sun, Chao
作者单位	1.Guangdong Inst New Mat, Key Lab Guangdong Modern Surface Engn Technol, Natl Engn Lab Modern Mat Surface Engn Technol, Guangzhou 510651, Guangdong, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
推荐引用方式 GB/T 7714	Guo, Chaoqian,Pei, Zhiliang,Gong, Jun,et al. Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films[J]. DIAMOND AND RELATED MATERIALS,2019,92:187-197.
APA	Guo, Chaoqian,Pei, Zhiliang,Gong, Jun,Sun, Chao,Lin, Songsheng,&Shi, Qian.(2019).Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films.DIAMOND AND RELATED MATERIALS,92,187-197.
MLA	Guo, Chaoqian,et al."Effects of bilayer number and thickness ratio on structure and properties of (Cr, N)-DLC/DLC multilayer films".DIAMOND AND RELATED MATERIALS 92(2019):187-197.