On-Demand Preparation of alpha-Phase-Dominated Tungsten Films for Highly Qualified Thermal Reflectors

doi:10.1002/admi.201900031

IMR OpenIR

	On-Demand Preparation of alpha-Phase-Dominated Tungsten Films for Highly Qualified Thermal Reflectors
	Wang, Xiaoyu 1; Zang, Rui 1; Gao, Junhua 1; Liu, Chen 2; Wang, Lei 2; Gong, Wenbin 3; Zha, Xianhu 4; Chen, Xingqiu 2; Huang, Feng 4; Javaid, Kashif 1; Xu, Zhi 5; Cao, Hongtao 1; Rogachev, Alexander A.6
通讯作者	Gao, Junhua(gaojunhua@nimte.ac.cn) ; Cao, Hongtao(h_cao@nimte.ac.cn)
	2019-06-01
发表期刊	ADVANCED MATERIALS INTERFACES
ISSN	2196-7350
卷号	6 期号:11 页码:12
摘要	Phase-structure diversity affords tungsten thin films with fascinating physical/chemical properties for varied applications. However, the on-demand preparation of W films with specific phase is still an important but unmet scientific issue. In this report, an easy-to-achieve preparation recipe is implemented for addressing the phase tailoring of tungsten films. The phase transformation evolution during deposition is governed by enhanced diffusion of W adatoms and selective atomic etching on the crystal planes. It is experimentally demonstrated that the orientation relation between {210}(beta) and {110}(alpha) planes plays a vital role in coupling with the competitive growth behaviors between beta- and alpha-W. The phase-dependent electrical/optical properties of W films are experimentally observed and unambiguously figured out by theoretical simulations. Alpha-phase-dominated W films are prepared successfully under relatively tolerant conditions, demonstrating a low resistivity of approximate to 13.6 mu omega cm and a high infrared reflectance larger than 93%. Alpha-W also serves as thermal reflector to construct a solar absorber, exhibiting a low thermal emissivity of approximate to 9.8%@500 degrees C. Understanding the (alpha, beta) phase transformation mechanism means a big step forward in the development of the on-demand preparation, which allows to build a scalable platform for making W films with specific phase in a more controllable way.
关键词	first-principles calculation infrared reflectance phase transformation resistivity thermal reflector tungsten thin film
资助者	Natural Science Foundation of Zhejiang Province ; Key Research and Development Plan of Jiangsu Province ; program for Ningbo Municipal Science and Technology Innovative Research Team ; National Nature Science Foundation of China
DOI	10.1002/admi.201900031
收录类别	SCI
语种	英语
资助项目	Natural Science Foundation of Zhejiang Province[LY17E020012] ; Key Research and Development Plan of Jiangsu Province[BE2015049] ; program for Ningbo Municipal Science and Technology Innovative Research Team[2016B10005] ; National Nature Science Foundation of China[51671193]
WOS研究方向	Chemistry ; Materials Science
WOS类目	Chemistry, Multidisciplinary ; Materials Science, Multidisciplinary
WOS记录号	WOS:000471079000015
出版者	WILEY
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/133920
专题	中国科学院金属研究所
通讯作者	Gao, Junhua; Cao, Hongtao
作者单位	1.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Graphene Technol & Applicat Zhejiang Prov, Ningbo 315201, Zhejiang, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Liaoning, Peoples R China 3.Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Suzhou 215123, Peoples R China 4.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Engn Lab Nucl Energy Mat, Ningbo 315201, Zhejiang, Peoples R China 5.Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China 6.Francisk Skorina Gomel State Univ, Gomel 246019, BELARUS
推荐引用方式 GB/T 7714	Wang, Xiaoyu,Zang, Rui,Gao, Junhua,et al. On-Demand Preparation of alpha-Phase-Dominated Tungsten Films for Highly Qualified Thermal Reflectors[J]. ADVANCED MATERIALS INTERFACES,2019,6(11):12.
APA	Wang, Xiaoyu.,Zang, Rui.,Gao, Junhua.,Liu, Chen.,Wang, Lei.,...&Rogachev, Alexander A..(2019).On-Demand Preparation of alpha-Phase-Dominated Tungsten Films for Highly Qualified Thermal Reflectors.ADVANCED MATERIALS INTERFACES,6(11),12.
MLA	Wang, Xiaoyu,et al."On-Demand Preparation of alpha-Phase-Dominated Tungsten Films for Highly Qualified Thermal Reflectors".ADVANCED MATERIALS INTERFACES 6.11(2019):12.