IMR OpenIR
Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers
Yang, Bing1; Li, Haining1,2; Yu, Biao1,2; Huang, Nan1; Liu, Lusheng1; Jiang, Xin1
Corresponding AuthorYang, Bing(byang@imr.ac.cn) ; Jiang, Xin(xjiang@imr.ac.cn)
2020-10-01
Source PublicationDIAMOND AND RELATED MATERIALS
ISSN0925-9635
Volume108Pages:10
AbstractDiamond/SiC interlayer with intermediate thermal expansion coefficient is introduced for improving the adhesion of NCD films on Ti substrate. Herein, tetramethylsilane (TMS) gas is added to produce SiC phase, forming a diamond/SiC interlayer. The effect of TMS gas flow on the microstructural evolution of the interfacial layer and the film adhesion is systematically investigated. At TMS gas flow of 5 sccm, the NCD film shows an interlayer of about 15% SiC by phase area statistics in SEM image. This film exhibits the lowest residual compressive stress of 1.64 GPa and the optimum adhesion of about 28.2 +/- 2 N against Ti substrate. Increasing TMS gas flow leads to the increase of SiC content and the grain refinement of diamond in the interlayers. It is found that Ti silicide and hydride with increased amount are formed in the Ti substrate at higher TMS gas flow. The presence of these Ti intermetallic compounds with larger thermal expansion coefficient results in the increased residual stress and poorer adhesion in the NCD films. On the basis of reduction of Ti intermetallic compounds, the addition of TMS gas flow at 5 sccm is crucial for the preparation of good-adhesion NCD films on Ti substrate.
KeywordDiamond film Chemical vapor deposition Microstructure Film adhesion High resolution transmission electron microscopy
Funding OrganizationNational Natural Science Foundation of China ; Liaoning Provincial Natural Science Foundation of China ; Institute of Metal Research, Chinese Academy of Sciences
DOI10.1016/j.diamond.2020.107928
Indexed BySCI
Language英语
Funding ProjectNational Natural Science Foundation of China[51872294] ; Liaoning Provincial Natural Science Foundation of China[Y931L90381] ; Institute of Metal Research, Chinese Academy of Sciences[Y5NCA111A1] ; Institute of Metal Research, Chinese Academy of Sciences[Y6NC6F1161]
WOS Research AreaMaterials Science ; Physics
WOS SubjectMaterials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000569885400012
PublisherELSEVIER SCIENCE SA
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/140506
Collection中国科学院金属研究所
Corresponding AuthorYang, Bing; Jiang, Xin
Affiliation1.Chinese Acad Sci, Inst Met Res IMR, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China
2.Univ Sci & Technol China, Dept Mat Sci & Engn, Hefei 230026, Peoples R China
Recommended Citation
GB/T 7714
Yang, Bing,Li, Haining,Yu, Biao,et al. Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers[J]. DIAMOND AND RELATED MATERIALS,2020,108:10.
APA Yang, Bing,Li, Haining,Yu, Biao,Huang, Nan,Liu, Lusheng,&Jiang, Xin.(2020).Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers.DIAMOND AND RELATED MATERIALS,108,10.
MLA Yang, Bing,et al."Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers".DIAMOND AND RELATED MATERIALS 108(2020):10.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Yang, Bing]'s Articles
[Li, Haining]'s Articles
[Yu, Biao]'s Articles
Baidu academic
Similar articles in Baidu academic
[Yang, Bing]'s Articles
[Li, Haining]'s Articles
[Yu, Biao]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Yang, Bing]'s Articles
[Li, Haining]'s Articles
[Yu, Biao]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.