Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers

doi:10.1016/j.diamond.2020.107928

IMR OpenIR

	Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers
	Yang, Bing 1; Li, Haining 1,2; Yu, Biao 1,2; Huang, Nan 1; Liu, Lusheng 1; Jiang, Xin 1
通讯作者	Yang, Bing(byang@imr.ac.cn) ; Jiang, Xin(xjiang@imr.ac.cn)
	2020-10-01
发表期刊	DIAMOND AND RELATED MATERIALS
ISSN	0925-9635
卷号	108 页码:10
摘要	Diamond/SiC interlayer with intermediate thermal expansion coefficient is introduced for improving the adhesion of NCD films on Ti substrate. Herein, tetramethylsilane (TMS) gas is added to produce SiC phase, forming a diamond/SiC interlayer. The effect of TMS gas flow on the microstructural evolution of the interfacial layer and the film adhesion is systematically investigated. At TMS gas flow of 5 sccm, the NCD film shows an interlayer of about 15% SiC by phase area statistics in SEM image. This film exhibits the lowest residual compressive stress of 1.64 GPa and the optimum adhesion of about 28.2 +/- 2 N against Ti substrate. Increasing TMS gas flow leads to the increase of SiC content and the grain refinement of diamond in the interlayers. It is found that Ti silicide and hydride with increased amount are formed in the Ti substrate at higher TMS gas flow. The presence of these Ti intermetallic compounds with larger thermal expansion coefficient results in the increased residual stress and poorer adhesion in the NCD films. On the basis of reduction of Ti intermetallic compounds, the addition of TMS gas flow at 5 sccm is crucial for the preparation of good-adhesion NCD films on Ti substrate.
关键词	Diamond film Chemical vapor deposition Microstructure Film adhesion High resolution transmission electron microscopy
资助者	National Natural Science Foundation of China ; Liaoning Provincial Natural Science Foundation of China ; Institute of Metal Research, Chinese Academy of Sciences
DOI	10.1016/j.diamond.2020.107928
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[51872294] ; Liaoning Provincial Natural Science Foundation of China[Y931L90381] ; Institute of Metal Research, Chinese Academy of Sciences[Y5NCA111A1] ; Institute of Metal Research, Chinese Academy of Sciences[Y6NC6F1161]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000569885400012
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：14[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/140506
专题	中国科学院金属研究所
通讯作者	Yang, Bing; Jiang, Xin
作者单位	1.Chinese Acad Sci, Inst Met Res IMR, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Dept Mat Sci & Engn, Hefei 230026, Peoples R China
推荐引用方式 GB/T 7714	Yang, Bing,Li, Haining,Yu, Biao,et al. Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers[J]. DIAMOND AND RELATED MATERIALS,2020,108:10.
APA	Yang, Bing,Li, Haining,Yu, Biao,Huang, Nan,Liu, Lusheng,&Jiang, Xin.(2020).Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers.DIAMOND AND RELATED MATERIALS,108,10.
MLA	Yang, Bing,et al."Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers".DIAMOND AND RELATED MATERIALS 108(2020):10.