Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering

doi:10.1016/j.jallcom.2020.156852

IMR OpenIR

	Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering
	Liu, Yanming 1; Tian, Li 1; Chang, Jianxiu 1; An, Minrong 1; Pei, Zhiliang 2; Fan, Di 2
通讯作者	Pei, Zhiliang(zlpei@imr.ac.cn) ; Fan, Di(dfan11s@alum.imr.ac.cn)
	2021-01-15
发表期刊	JOURNAL OF ALLOYS AND COMPOUNDS
ISSN	0925-8388
卷号	851 页码:10
摘要	WB2/CrN multilayer films with thick modulation period about 500 nm but different modulation ratios (t(W)(B2):t(CrN) = 1.2, 2, 3 and 4) were deposited on steel substrates by magnetron sputtering, and the effect of modulation ratio on the structure, residual stress and tribo-mechanical properties of the WB2/CrN multilayer films was systematically studied. Additionally, WB2 and CrN monolayer films with various thicknesses were also prepared to discuss the growth behavior and the related properties of the WB2/CrN multilayer films. All the sample films present the columnar growth, and the particle size in the WB2 monolayers is smaller than that in the corresponding WB2 sublayers. The preferred orientation of WB2 (260-400nm) and CrN monolayers (132-220 nm) is (101) and (111), respectively. However, the multilayered structure changes the orientation of CrN sublayers to (002), and crystalline Cr2N phase is detected in WB2/CrN multilayers caused by the element diffusion at interface. Moreover, the multilayered structure reduces the compressive stress of the WB2 films greatly by diffusion of point defects to interfaces and an indirect effect of interfaces on stress via film structure with soft CrN, and the residual stress of the WB2, CrN and WB2/CrN films is -2.64 similar to-4.16, -0.85-0.57 and -1.49 similar to-2.61 GPa, respectively. Furthermore, film hardness ranging from 27.9 to 33.0 GPa mainly obeys the rule of mixture. The adhesive strength drops greatly from 26 to 17 N with the increasing t(W)(B2):t(CrN), and the tensile CrN bottom-layer deteriorates the adhesive strength of the WB2/CrN multilayers with t(W)(B2):t(CrN) = 2. Overall, WB2/CrN films with t(W)(B2):t(CrN) = 3 show better wear resistance with lower friction coefficient similar to 0.35 and wear rate about 3.6 x 10(-7) mm(3)/mN benefiting from their higher hardness, lower roughness, proper toughness and compressive stress. (C) 2020 Elsevier B.V. All rights reserved.
关键词	Magnetron sputtering WB2/CrN multilayers Modulation ratio Mechanical properties
资助者	Natural Science Foundation of China ; Innovation Team Funding by Xi'an Shiyou University ; National Science and Technology Major Project ; Natural Science Foundation of Shaanxi Province of China ; Scientific Research Program - Shaanxi Provincial Education Department
DOI	10.1016/j.jallcom.2020.156852
收录类别	SCI
语种	英语
资助项目	Natural Science Foundation of China[51701157] ; Innovation Team Funding by Xi'an Shiyou University[2019QNKYCXTD12] ; National Science and Technology Major Project[2017-VI-0019-0019] ; Natural Science Foundation of Shaanxi Province of China[2018JQ5198] ; Scientific Research Program - Shaanxi Provincial Education Department[19JK0672]
WOS研究方向	Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000579868900083
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/141128
专题	中国科学院金属研究所
通讯作者	Pei, Zhiliang; Fan, Di
作者单位	1.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Liu, Yanming,Tian, Li,Chang, Jianxiu,et al. Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2021,851:10.
APA	Liu, Yanming,Tian, Li,Chang, Jianxiu,An, Minrong,Pei, Zhiliang,&Fan, Di.(2021).Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering.JOURNAL OF ALLOYS AND COMPOUNDS,851,10.
MLA	Liu, Yanming,et al."Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering".JOURNAL OF ALLOYS AND COMPOUNDS 851(2021):10.