| Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon | |
| Alternative Title | Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon |
| Wang Minghai1; Wang Ben1; Zheng Yaohui1 | |
| 2015 | |
| Source Publication | Chinese Journal of Aeronautics
 |
| ISSN | 1000-9361 |
| Volume | 28Issue:4Pages:1273-1280 |
| Abstract | Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time. The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked. This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness. Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon. The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses. A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials. On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece. |
| Other Abstract | Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time. The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked. This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness. Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon. The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses. A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials. On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece. |
| Keyword | Anisotropy of surface roughness Cutting speed Edge radius Single-crystal silicon Strain rate Ultra-precision turning Weakening Motor vehicles. Aeronautics. Astronautics TL1-4050 |
| Indexed By | CSCD |
| Language | 英语 |
| Funding Project | [National Defence Scientific Research of China] |
| CSCD ID | CSCD:5498229 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/142563 |
| Collection | 中国科学院金属研究所 |
| Affiliation | 1.中国科学院金属研究所 2.Beijing University Aeronaut & Astronaut, Sch Mech Engn & Automat, Beijing 100191, Peoples R China |
| Recommended Citation GB/T 7714 | Wang Minghai,Wang Ben,Zheng Yaohui. Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon[J]. Chinese Journal of Aeronautics,2015,28(4):1273-1280. |
| APA | Wang Minghai,Wang Ben,&Zheng Yaohui.(2015).Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon.Chinese Journal of Aeronautics,28(4),1273-1280. |
| MLA | Wang Minghai,et al."Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon".Chinese Journal of Aeronautics 28.4(2015):1273-1280. |
| Files in This Item: | There are no files associated with this item. | |||||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment