Alternative TitleEffect of Ce^3+ concentration on luminescent properties of Al2O3 : Ce^3+ films by medium frequency reactive magnetron sputtering
廖国进; 巴德纯; 闻立时; 刘斯明; 阎绍峰
Source Publication功能材料与器件学报
Other AbstractAluminum oxide film doped with cerium was deposited by the medium frequency reactive magnetron sputtering technique, under the deposition condition of constant power, 30 minutes duration, Ar and 02 flow of 23 and 5 sccm, the relationship of luminescent properties of Al2O3 : Ce^3+ films with the amount of Ce^3+ incorporated in the films was studied. The presence of Ce^3+ and the stoichiometry of these films have been determined by energy dispersive x - ray spectroscope (EDS) measurements. It is observed that the total luminescence intensity increases and the peak sits strongly depends on the cerium concentration in the films. And served light emission generated the reason for the dependence was analyzed. It is proposed that the obby luminescent center is associated with cerium chloride molecular rather than atomic cerium impurities. The crystalline structure of the sample was analysed by x - ray diffractometry (XRD). This luminescence feature has an advantage in display techniques that require a purer blue emission.
Keyword三氧化二铝薄膜 中频反应磁控溅射 掺杂浓度 光致发光 Ce
Indexed ByCSCD
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廖国进,巴德纯,闻立时,等. 掺杂浓度对中频反应磁控溅射制备Al2O3:Ce^3+薄膜发光性能的影响[J]. 功能材料与器件学报,2007,13.0(006):543-548.
APA 廖国进,巴德纯,闻立时,刘斯明,&阎绍峰.(2007).掺杂浓度对中频反应磁控溅射制备Al2O3:Ce^3+薄膜发光性能的影响.功能材料与器件学报,13.0(006),543-548.
MLA 廖国进,et al."掺杂浓度对中频反应磁控溅射制备Al2O3:Ce^3+薄膜发光性能的影响".功能材料与器件学报 13.0.006(2007):543-548.
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