Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating

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	Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating
其他题名	Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating
	Zhao Shilu 1; Zhang Zhen 2; Zhang Jun 1; Wang Shuanghong 1; Zhang Zhenggui 1
	2016
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	45 期号:5 页码:1320-1324
摘要	The (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N and CrN/(Ti, Al, Zr, Cr)N four-component bilayer nitride films were deposited on cemented carbide (WC-8%Co) substrates by a multi-arc ion plating technique using the combined Ti-Al-Zr alloy and pure Cr targets. The morphology, composition and crystalline structure of two bilayer films were analyzed by scanning electron microscopy (SEM), energy disperse X-ray spectroscopy (EDS) and X-ray diffraction (XRD). Scratch test and Vickers microindentation were used to compare the mechanical properties of the two bilayer films. It is shown that the two prepared bilayer films are still the TiN (B1-NaCl) face-centered cubic structure. The cross-sectional morphologies are typical columnar crystal structures. As the bias voltages vary from -50 to -200 V, the mechanical properties of the two bilayer films are better than those of the (Ti, Al, Zr, Cr)N monolayer films and almost close to those of the Ti-Al-Zr-Cr-N gradient films. The microhardness of the (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N bilayer film (max. HV0.01 41 GPa) is higher than that of the CrN/(Ti, Al, Zr, Cr)N film. However, the adhesive force of the CrN/(Ti, Al, Zr, Cr)N bilayer film is superior to that of the (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N film (all > 200 N).
关键词	COATINGS PERFORMANCE multi-arc ion plating (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N CrN/(Ti, Al, Zr, Cr)N microhardness adhesive force
收录类别	CSCD
语种	英语
CSCD记录号	CSCD:5713044
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/146711
专题	中国科学院金属研究所
作者单位	1.沈阳大学 2.中国科学院金属研究所
推荐引用方式 GB/T 7714	Zhao Shilu,Zhang Zhen,Zhang Jun,et al. Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating[J]. RARE METAL MATERIALS AND ENGINEERING,2016,45(5):1320-1324.
APA	Zhao Shilu,Zhang Zhen,Zhang Jun,Wang Shuanghong,&Zhang Zhenggui.(2016).Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating.RARE METAL MATERIALS AND ENGINEERING,45(5),1320-1324.
MLA	Zhao Shilu,et al."Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating".RARE METAL MATERIALS AND ENGINEERING 45.5(2016):1320-1324.