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Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating
Alternative TitleMicrostructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating
Zhao Shilu1; Zhang Zhen2; Zhang Jun1; Wang Shuanghong1; Zhang Zhenggui1
2016
Source PublicationRARE METAL MATERIALS AND ENGINEERING
ISSN1002-185X
Volume45Issue:5Pages:1320-1324
AbstractThe (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N and CrN/(Ti, Al, Zr, Cr)N four-component bilayer nitride films were deposited on cemented carbide (WC-8%Co) substrates by a multi-arc ion plating technique using the combined Ti-Al-Zr alloy and pure Cr targets. The morphology, composition and crystalline structure of two bilayer films were analyzed by scanning electron microscopy (SEM), energy disperse X-ray spectroscopy (EDS) and X-ray diffraction (XRD). Scratch test and Vickers microindentation were used to compare the mechanical properties of the two bilayer films. It is shown that the two prepared bilayer films are still the TiN (B1-NaCl) face-centered cubic structure. The cross-sectional morphologies are typical columnar crystal structures. As the bias voltages vary from -50 to -200 V, the mechanical properties of the two bilayer films are better than those of the (Ti, Al, Zr, Cr)N monolayer films and almost close to those of the Ti-Al-Zr-Cr-N gradient films. The microhardness of the (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N bilayer film (max. HV0.01 41 GPa) is higher than that of the CrN/(Ti, Al, Zr, Cr)N film. However, the adhesive force of the CrN/(Ti, Al, Zr, Cr)N bilayer film is superior to that of the (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N film (all > 200 N).
KeywordCOATINGS PERFORMANCE multi-arc ion plating (Ti, Al, Zr)N/(Ti, Al, Zr, Cr)N CrN/(Ti, Al, Zr, Cr)N microhardness adhesive force
Indexed ByCSCD
Language英语
CSCD IDCSCD:5713044
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/146711
Collection中国科学院金属研究所
Affiliation1.沈阳大学
2.中国科学院金属研究所
Recommended Citation
GB/T 7714
Zhao Shilu,Zhang Zhen,Zhang Jun,et al. Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating[J]. RARE METAL MATERIALS AND ENGINEERING,2016,45(5):1320-1324.
APA Zhao Shilu,Zhang Zhen,Zhang Jun,Wang Shuanghong,&Zhang Zhenggui.(2016).Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating.RARE METAL MATERIALS AND ENGINEERING,45(5),1320-1324.
MLA Zhao Shilu,et al."Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating".RARE METAL MATERIALS AND ENGINEERING 45.5(2016):1320-1324.
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