Titanium oxide ftlms were grown by reactive magnetron sputtering trader different pressures of pure oxygen,ranging from 1,0 Pa to 4.0 Pa, at a fixed oxygen flow rate of 10 cm^3/min.The surface microstructures were characterized with X-ray diffraction(XRD) and atomic force microscopy(AFM). The results show that the film gorwn trader the oxygen pressure of 2.5 Pa displays the best hydrophilicity, Interesting fincling is that ultraviolet light irradiation considerably reduces its water contact angle.Possible mechanism(s) was also tentatively discussed,
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