Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation

IMR OpenIR

	Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation
其他题名	Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation
	Hao LiNa 1; Zhang JiangBo 2; Xi Ning 2
	2008
发表期刊	CHINESE SCIENCE BULLETIN
ISSN	1001-6538
卷号	53 期号:13 页码:2090-2096
摘要	Efficiency and accuracy of AFM-based nanomanipulation are still major problems to be solved, due to the nonlinearities and uncertainties, such as drift, creep, hysteresis, etc. The deformation of cantilevers caused by manipulation force is also one of the most major factors of nonlinearities and uncertainties. It causes difficulties in precise control of the tip position and causes the tip to miss the position of the object. In order to solve this problem, the traditional approach is to use a rigid cantilever. However, this will significantly reduce the sensitivity of force sensing during manipulation, which is essential for achieving an efficient and reliable nanomanipulation. In this paper, a kind of active AFM probe has been used to solve this problem by directly controlling the cantilever's flexibility or rigidity during manipulation. Based on Euller-Bernoulli Model, a kind of controller of the active probe employing Periodic-Output-Feedback (POF) law is implemented. The results of simulation and experiments have demonstrated that this theoretical model and POF controller are suitable for precise position control of nanomanipulation.
其他摘要	Efficiency and accuracy of AFM-based nanomanipulation are still major problems to be solved, due to the nonlinearities and uncertainties, such as drift, creep, hysteresis, etc. The deformation of cantilevers caused by manipulation force is also one of the most major factors of nonlinearities and uncertainties. It causes difficulties in precise control of the tip position and causes the tip to miss the position of the object. In order to solve this problem, the traditional approach is to use a rigid cantilever. However, this will significantly reduce the sensitivity of force sensing during manipulation, which is essential for achieving an efficient and reliable nanomanipulation. In this paper, a kind of active AFM probe has been used to solve this problem by directly controlling the cantilever’s flexibility or rigidity during manipulation. Based on Euller-Bernoulli Model, a kind of controller of the active probe employing Periodic-Output-Feedback (POF) law is implemented. The results of simulation and experiments have demonstrated that this theoretical model and POF controller are suitable for precise position control of nanomanipulation.
关键词	GRIPPER DRIVEN BEAM AFM active probe atomic force microscopy nanomanipulation periodic-output-feedback control
收录类别	CSCD
语种	英语
CSCD记录号	CSCD:3435530
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/148847
专题	中国科学院金属研究所
作者单位	1.中国科学院金属研究所 2.密西根州立大学
推荐引用方式 GB/T 7714	Hao LiNa,Zhang JiangBo,Xi Ning. Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation[J]. CHINESE SCIENCE BULLETIN,2008,53(13):2090-2096.
APA	Hao LiNa,Zhang JiangBo,&Xi Ning.(2008).Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation.CHINESE SCIENCE BULLETIN,53(13),2090-2096.
MLA	Hao LiNa,et al."Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation".CHINESE SCIENCE BULLETIN 53.13(2008):2090-2096.