In this paper, surface modification of silicone rubber by CF4 radio frequency capacitively coupled plasma was studied by using static contact angle and XPS technique. It is found that the surface treatment could well improve the hydro-phobic and oleo-phobic properties of silicone rubber due to the formation of the abundant Si--F functional groups and a small quantity of fluorocarbon groups through the competition between the fluorination and ablation or etching.
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