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An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
Alternative TitleAn automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
Wei YangJie1; Wu ChengDong1; Dong ZaiLi2
2011
Source PublicationSCIENCE CHINA-TECHNOLOGICAL SCIENCES
ISSN1674-7321
Volume54Issue:9Pages:2397-2403
AbstractAtomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate.
Other AbstractAtomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate.
KeywordATOMIC-FORCE MICROSCOPY CARBON NANOTUBES atomic force microscope (AFM) compression effect information fusion surface elasticity
Indexed ByCSCD
Language英语
Funding Project[CAS]
CSCD IDCSCD:4424509
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/156833
Collection中国科学院金属研究所
Affiliation1.中国科学院金属研究所
2.中国科学院
Recommended Citation
GB/T 7714
Wei YangJie,Wu ChengDong,Dong ZaiLi. An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2011,54(9):2397-2403.
APA Wei YangJie,Wu ChengDong,&Dong ZaiLi.(2011).An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,54(9),2397-2403.
MLA Wei YangJie,et al."An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 54.9(2011):2397-2403.
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