| Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas | |
| 其他题名 | Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas |
| Wang Zhan1; Gao Wei1; Zhang Peng1; Yan Huijie2; Ren Chunsheng2 | |
| 2015 | |
| 发表期刊 | PLASMA SCIENCE & TECHNOLOGY
 |
| ISSN | 1009-0630 |
| 卷号 | 17期号:3页码:191-195 |
| 摘要 | In this paper, the double-discharge plasma generated by radio frequency (RF) and direct current (DC) has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density. |
| 其他摘要 | In this paper, the double-discharge plasma generated by radio frequency (RF) and direct current (DC) has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density. |
| 关键词 | HIGH-DENSITY ICP DC discharge Langmuir probe plasma characteristic |
| 收录类别 | CSCD |
| 语种 | 英语 |
| 资助项目 | [National Natural Science Foundation of China] |
| CSCD记录号 | CSCD:5372062 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.imr.ac.cn/handle/321006/157439 |
| 专题 | 中国科学院金属研究所 |
| 作者单位 | 1.中国科学院金属研究所 2.大连大学 |
| 推荐引用方式 GB/T 7714 | Wang Zhan,Gao Wei,Zhang Peng,et al. Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas[J]. PLASMA SCIENCE & TECHNOLOGY,2015,17(3):191-195. |
| APA | Wang Zhan,Gao Wei,Zhang Peng,Yan Huijie,&Ren Chunsheng.(2015).Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas.PLASMA SCIENCE & TECHNOLOGY,17(3),191-195. |
| MLA | Wang Zhan,et al."Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas".PLASMA SCIENCE & TECHNOLOGY 17.3(2015):191-195. |
| 条目包含的文件 | 条目无相关文件。 | |||||
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