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Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas
Alternative TitleStudy of the Characteristics of DC and ICP Hybrid Discharge Plasmas
Wang Zhan1; Gao Wei1; Zhang Peng1; Yan Huijie2; Ren Chunsheng2
2015
Source PublicationPLASMA SCIENCE & TECHNOLOGY
ISSN1009-0630
Volume17Issue:3Pages:191-195
AbstractIn this paper, the double-discharge plasma generated by radio frequency (RF) and direct current (DC) has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.
Other AbstractIn this paper, the double-discharge plasma generated by radio frequency (RF) and direct current (DC) has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.
KeywordHIGH-DENSITY ICP DC discharge Langmuir probe plasma characteristic
Indexed ByCSCD
Language英语
Funding Project[National Natural Science Foundation of China]
CSCD IDCSCD:5372062
Citation statistics
Cited Times:2[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/157439
Collection中国科学院金属研究所
Affiliation1.中国科学院金属研究所
2.大连大学
Recommended Citation
GB/T 7714
Wang Zhan,Gao Wei,Zhang Peng,et al. Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas[J]. PLASMA SCIENCE & TECHNOLOGY,2015,17(3):191-195.
APA Wang Zhan,Gao Wei,Zhang Peng,Yan Huijie,&Ren Chunsheng.(2015).Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas.PLASMA SCIENCE & TECHNOLOGY,17(3),191-195.
MLA Wang Zhan,et al."Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas".PLASMA SCIENCE & TECHNOLOGY 17.3(2015):191-195.
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