Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot

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	Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot
其他题名	Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot
	Cong Ming 1; Wen Haiying 1; Du Yu 1; Dai Penglei 2
	2012
发表期刊	CHINESE JOURNAL OF MECHANICAL ENGINEERING
ISSN	1000-9345
卷号	25 期号:4 页码:706-714
摘要	Compared with traditional mechanical seals, magnetic fluid seals have unique characters of high airtightness, minimal friction torque requirements, pollution-free and long life-span, widely used in vacuum robots. With the rapid development of Integrate Circuit (IC), there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment. The parameters of magnetic fluid seals structure is very important in the vacuum robot design. This paper gives a magnetic fluid seal device for the robot. Firstly, the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics, which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal. Secondly, the magnetic analysis model of twin-shaft magnetic fluid seals structure is established. By analyzing the magnetic field distribution of dual magnetic fluid seal, the optimal value ranges of important parameters, including parameters of the permanent magnetic ring, the magnetic pole tooth, the outer shaft, the outer shaft sleeve and the axial relative position of two permanent magnetic rings, which affect the seal differential pressure, are obtained. A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built. Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min, the maximum burst pressure is about 0.24 MPa. Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot. The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.
其他摘要	Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the rapid development of Integrate Circuit（IC）,there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment.The parameters of magnetic fluid seals structure is very important in the vacuum robot design.This paper gives a magnetic fluid seal device for the robot.Firstly,the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics,which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal.Secondly,the magnetic analysis model of twin-shaft magnetic fluid seals structure is established.By analyzing the magnetic field distribution of dual magnetic fluid seal,the optimal value ranges of important parameters,including parameters of the permanent magnetic ring,the magnetic pole tooth,the outer shaft,the outer shaft sleeve and the axial relative position of two permanent magnetic rings,which affect the seal differential pressure,are obtained.A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built.Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min,the maximum burst pressure is about 0.24 MPa.Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot.The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.
关键词	magnetic fluid seals coaxial twin-shaft magnetic field wafer handling robot
收录类别	CSCD
语种	英语
资助项目	[National Natural Science Foundation of China]
CSCD记录号	CSCD:4584394
引用统计	被引频次：1[CSCD] [CSCD记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/157661
专题	中国科学院金属研究所
作者单位	1.大连大学 2.中国科学院金属研究所
推荐引用方式 GB/T 7714	Cong Ming,Wen Haiying,Du Yu,et al. Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot[J]. CHINESE JOURNAL OF MECHANICAL ENGINEERING,2012,25(4):706-714.
APA	Cong Ming,Wen Haiying,Du Yu,&Dai Penglei.(2012).Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot.CHINESE JOURNAL OF MECHANICAL ENGINEERING,25(4),706-714.
MLA	Cong Ming,et al."Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot".CHINESE JOURNAL OF MECHANICAL ENGINEERING 25.4(2012):706-714.