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Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate
Alternative TitleFrictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate
Lin Zeng1; Wang Feng2; Gao Ding1; Ba Dechun1; Liu Chunming2
2013
Source PublicationPLASMA SCIENCE & TECHNOLOGY
ISSN1009-0630
Volume15Issue:7Pages:690-695
AbstractIn this work, diamond-like-carbon (DLC) films were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon films were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC films. The deposited films were investigated by means of field-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the films were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the films were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC films correlated to the sp(2) content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC films correlated to the sp(3) content of the coatings.
Other AbstractIn this work, diamond-like-carbon (DLC) fllms were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon fllms were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC fllms. The deposited fllms were investigated by means of fleld-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the fllms were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the fllms were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC fllms correlated to the sp~2 content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC fllms correlated to the sp~3 content of the coatings.
KeywordMECHANICAL-PROPERTIES FILMS DEPOSITION RAMAN diamond-like-carbon films PECVD microstructure frictional and optical properties
Indexed ByCSCD
Language英语
Funding Project[China Postdoctoral Science Foundation Funded Project] ; [Liaoning Province of China] ; [Shenyang City of China] ; [Fundamental Research Funds for the Central Universities, China]
CSCD IDCSCD:4881976
Citation statistics
Cited Times:4[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/158234
Collection中国科学院金属研究所
Affiliation1.东北大学
2.中国科学院金属研究所
Recommended Citation
GB/T 7714
Lin Zeng,Wang Feng,Gao Ding,et al. Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate[J]. PLASMA SCIENCE & TECHNOLOGY,2013,15(7):690-695.
APA Lin Zeng,Wang Feng,Gao Ding,Ba Dechun,&Liu Chunming.(2013).Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate.PLASMA SCIENCE & TECHNOLOGY,15(7),690-695.
MLA Lin Zeng,et al."Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate".PLASMA SCIENCE & TECHNOLOGY 15.7(2013):690-695.
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