| 一种多功能金刚石薄膜的热丝化学气相沉积装置 | |
| 刘鲁生、姜辛、黄楠 | |
| 2019-10-22 | |
| Rights Holder | 刘鲁生、姜辛、黄楠 |
| Country | 中国 |
| Subtype | 实用新型 |
| Patent Number | 201822033983.5 |
| Document Type | 专利 |
| Identifier | http://ir.imr.ac.cn/handle/321006/158456 |
| Collection | 中国科学院金属研究所 |
| Affiliation | 中国科学院金属研究所 |
| Recommended Citation GB/T 7714 | 刘鲁生、姜辛、黄楠. 一种多功能金刚石薄膜的热丝化学气相沉积装置. 201822033983.5[P]. 2019-10-22. |
| Files in This Item: | There are no files associated with this item. | |||||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment