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Sn基焊料在薄膜及其Pattern和FeNi镀层上的反应润湿行为
其他题名REACTIVE WETTING OF SN-BASED SOLDERS ON THIN FILMS, PATTERN AND ELECTRODEPOSITED FENI LAYERS
刘葳
学位类型博士
导师尚建库
2008-07-28
学位授予单位中国科学院金属研究所
学位授予地点金属研究所
学位专业材料物理与化学
关键词反应润湿 Feni镀层 无铅焊料 薄膜pattern 退润湿
摘要大规模集成电路技术的飞速发展,即集成度每年都会翻倍,对电子封装技术提出了越来越高的要求,而倒装焊微互联技术成为满足高密度封装的最主要技术。在覆晶封装中,通常在芯片上会镀上一层导体金属作为连接焊盘。由于导体金属薄膜很薄,在与Sn基焊料反应时出现了与块体金属不一样的界面反应行为,即薄膜金属会被焊料消耗完导致焊点的失效,这是目前电子封装中急需解决的问题。因此,Sn基焊料与导体薄膜的反应润湿与退润湿行为得到了越来越广泛的关注,本文选取Sn基焊料的代表焊料SnPb,研究了其在不同厚度的Cu膜上的反应润湿行为。研究结果表明在薄的Cu膜上退润湿会发生,而在厚膜上退润湿不会发生,由此可知一定存在着一个临界膜厚使得退润湿不发生。究其原因,在界面中间的化合物状态与润湿前沿的化合物状态是不一样的,即在润湿前沿金属间化和物没有发生球化上浮,正是这一小部分特殊结构使得铺展球冠稳定得呆在Si基地上。薄膜越厚,润湿前沿该特殊结构尺寸越大,其对铺展球冠的稳定作用就越强,从而即使spalling现象发生,推润湿也不会发生。 FeNi合金作为电极材料已经在工业上得到了广泛应用,但是其与Sn基焊料、尤其是无Pb焊料SnAgCu的液固反应与时效反应都缺乏研究。本实验采用电镀技术制备了不同成分的FexNiy合金镀层,考察了共晶SnAgCu焊料在其上的反应润湿行为。研究结果表明,在该反应润湿体系中存在着伪部分润湿行为,即在铺展球冠主液体的前沿存在着液态膜。另外,我们发现,镀层中Fe含量越高,在液固界面处会形成一层致密的Fe-Sn化和物层,可以有效地组织液固进一步反应;然而,对于低Fe的镀层,SnAgCu与镀层的反应速度很快,镀层的消耗速度也很快。最后,值得指出的是,无论是低Fe还是高Fe的镀层,与共晶SnAgCu焊料的时效反应速度都很快,比与Cu的时效反应速度还快。 固体表面的微结构化对反应润湿的热力学与动力学都有重要的影响。本文考察了SnPb焊料在Au/Cu与Si相间的微结构表面的反应润湿行为,发现焊料液体会呆在Au/Cu区域,而且在主液体的铺展前沿观察到了液态膜的快速与长距离的铺展。铺展动力学曲线与原位的铺展过程观察表明,该铺展过程可以分为三个阶段,即液体的粘滞性流动阶段、液态膜的快速生长阶段以及液体以前驱膜为润滑层的慢速流动阶段。在液体的粘滞性流动阶段,忽略重力,液体的铺展驱动力为毛细力。液态膜的快速生长机制明显区别于前者,根据实验观察与理论分析,我们认为是因为Au/Cu双层膜的特殊结构,以及Au、Cu在液体焊料里的溶解度差异与对焊料的润湿性差异,由Au诱发了液体SnPb在Cu上的快速流动。
其他摘要As the integrated circuit technology advances, area array of solder bumps is the only existing technology to accommodate the high density of input/output numbers. In the case of chip-level interconnection, a multilayered thin film metallization of Au/Cu/Cr is being used for bonding pad on a Si chip and the typical thickness of Cu in the metallization is about 0.5μm. It has been reported that the spalling of Cu6Sn5 will happen just because the amount of Cu available is very limited for reaction. The spalling can lead to solder dewetting on the exposed underlayer Cr, and weaken the solder joints. This is an urgent problem because of the wide application of solder joints in flip-chip technology. However, the deweting behavior of Sn-based solders on thin film is very complicated and far from complete. solder wetting on thin films has currently attracted much more attention. However, at present it has not been reported how the film thickness affect the solder dewetting behavior especially reflowed in the vaccum or with H2 protection. The dewetting behavior strongly depended on the film thickness. On the thinner Cu films with the thickness of ≤0.45μm, dewetting behavior occurred. However, on thicker Cu films with the thicknesses of 1.07μm and 1.40μm, dewetting did not occur even after a longer reflow time. A critical film thickness fell between 1.07μm and 0.45μm, which satisfied non-dewetting exactly. The non-spalled Cu-Sn compounds, at the wetting tips, were clearly revealed by Focused ion beam cross-sectional analysis. The special and peculiar structure was proposed to be formed due to a limited amount of Sn for Cu-Sn reaction, whose size strongly depended on the film thickness. When the Cu film thickness was thick enough, the anchored force at the tips would stabilized the solder cap equilibrium on unwettable Si. Another experiment was conducted to confirm the pinning effect of wetting tip during dewetting. Reactive wetting of eutectic SnAgCu solder on electrodeposited FexNiy layers was also investigated in a vaccum furnace with H2 protection. In this reactive wetting system, we also found a pseudo-partial wetting phenomenon, that is, a liquid film attached to the main liquid front. When eutectic SnAgCu solders were reflowed on high-Fe FeNi layers, dense Fe-Sn comounds would be formed at the interface and inhibit further interfacial reactions. In contrast, low-Fe FeNi layers would be consumed fast without denser Fe-Sn compounds formed at the interface. Finally, eutectic SnAgCu reacted with elctrodeposited FexNiy layers much faster in aging treatment that that with Cu. Reactive wetting and spreading of liquid SnPb have been examined on the structured Au/Cu film with H2 protection. The striped structures played an important role in determining the thermodynamics and dynamics of reactive wetting or dewetting. Special attention has been paid to the liquid film, which extended from the viscous flow front and spread fast on the gold-coated copper line. Strong affinity of Au-Sn was proposed to induce the fast spreading of liquid film on the layered Au/Cu copper line.
页数131
语种中文
文献类型学位论文
条目标识符http://ir.imr.ac.cn/handle/321006/16863
专题中国科学院金属研究所
推荐引用方式
GB/T 7714
刘葳. Sn基焊料在薄膜及其Pattern和FeNi镀层上的反应润湿行为[D]. 金属研究所. 中国科学院金属研究所,2008.
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