IMR OpenIR
电场与热场下无铅焊料的界面反应
其他题名Interfacial Reactions of Lead-free Solder under Electrical and Thermal Loading
张新房
学位类型博士
导师尚建库
2009-07-10
学位授予单位中国科学院金属研究所
学位授予地点金属研究所
学位专业材料学
关键词无铅焊料 共晶snzn焊料 电迁移 反常极性效应 界面相变 预应变 界面反应 电镀feni
摘要界面反应对于微电子互连体的可靠性具有重要的影响,尤其是对于倒装焊点。通常,当电子器件运作时,其互连焊点会遭受热场以及电场的作用。因此,研究热场以及电场下的无铅焊料的界面反应显得意义重大。本论文着重研究了无铅Sn-9Zn互连焊点的电迁移行为,并发现了一种可以有效抑制无铅焊点电迁移失效的方法。同时,对热场下FeNi/SnZn以及Ni/Sn-xZn的界面反应也做了相应的研究。 对Sn-9Zn/Cu互连界面的电迁移现象研究表明:高密度电流引发了SnZn/Cu界面化合物的“反常极性效应”,即阴极界面化合物的生长明显快于阳极界面化合物的生长。这种反常的极性效应被认为是Sn原子和Zn原子沿着相反方向的电迁移所导致的,而Sn原子与Zn原子的反向迁移则是由于其较大的有效电荷数差异所诱发。在电子风力的作用下,Sn原子向阳极迁移;而其迁移所导致的回流力驱使Zn原子向阴极迁移。通过对Zn原子迁移的动力学分析,解释了阴阳两极界面化合物的差异生长。 对Ni/Sn-9Zn/Cu耦合互连界面的电迁移现象研究发现界面化合物的生长与电流方向密切相关。当电子流由Ni端流向Cu端时,Cu5Zn8相和Ni5Zn21相分别在SnZn/Cu以及SnZn/Ni界面上形成。而当电子流反向时,也就是电子流由Cu端流向Ni端时,电流引发了互连界面化合物的相变。在SnZn/Ni界面,Cu6Sn5相取代了Ni5Zn21相;在SnZn/Cu界面,β-CuZn 相取代了Cu5Zn8相。基于Zn原子与Cu原子的扩散动力学分析表明,不同电子流方向导致各原子流扩散方向及大小发生变化是诱发界面相变的主要原因。 发现了一种抑制互连焊点电迁移失效的方法:通过引入预应变于SnBi焊点中,电流作用下Bi的界面偏聚被有效抑制。对于经过预应变塑性变形处理的SnAgCu焊料凸点,经长时间电流加载后其阴阳两极界面上的化合物组织结构仍保持对称,没有发生常见的“极性效应”,即阳极化合物比阴极化合物厚的现象。因而,预应变塑性变形处理提供了一种独特而又有效的抑制互连凸点电迁移失效的方法。初步分析认为其抑制机理是位错对主扩散原子的钉扎作用延缓了原子的扩散速率。 对Cu/FeNi/Sn/FeNi/Cu互连界面的电迁移现象研究表明:电流引发了Sn/FeNi界面化合物FeSn2相的“反常极性效应”,即阴极FeSn2化合物的生长明显快于阳极FeSn2化合物的生长。这种反常的极性效应被认为是Fe原子沿着电子流相反方向的迁移所致。同时,一层富Cu相靠近FeSn2相在阳极界面生成。通过对Fe原子与Cu原子迁移的动力学分析,解释了阴阳两极界面化合物的差异生长。 研究了FeNi/SnZn的界面反应以及分析了其界面化合物的生长动力学。实验结果表明:其界面生成物为Fe-Zn相而非Fe-Sn 相。原因在于Fe与Zn的相互作用比Fe与Sn的相互作用更强。计算分析表明,Fe-Zn相的生长因子接近0.5,即Fe-Zn相为扩散控制的抛物线生长,即使在高温下也是如此。Fe-Zn相的形成激活能为42KJ/mol,与报道数值相符。 在电子器件及其印刷电路板中,Ni被广泛的用作可焊阻挡层。在回流和时效中,如果不对Sn-Ni界面化合物以及富P相的生成加以控制,其生长会降低焊点的可靠性。因而限制Ni-Sn化合物的生长以及富P相的生成显得非常有必要。研究发现:微量Zn的添加使Sn/Ni界面原有的Ni3Sn4相发生了改变,即在回流和固态时效的过程中,三元的Ni4(Sn1-x,Znx)相于Sn/Ni界面上生成,而不是Ni3Sn4相。对于三元固溶体Ni4(Sn1-x,Znx)相,其晶格参数随着Zn含量的增加而收缩,遵循Vegard定律。所以相对于Ni3Sn4相,元素更难扩散通过晶格稠密的Ni4(Sn1-x,Znx)相与基体反应,进而含Zn的Sn焊料表现出了更慢的消耗Ni-P UBM的速率。
其他摘要Interfacial reactions are critical for the reliability of microelectronic interconnects, especially for flip chip solder joints. Usually, the solder interconnects are subjected to both thermal and electrical loading when an electronic device is in operation. Thus, the study about interfacial reactions of lead-free solders under electrical and thermal loading gets very important. In the present work, the electromigration behavior of Sn-9Zn solder bump interconnect was investigated, and a new method to restrain the electromigration in lead-free solder interconnects was developed. Meanwhile, interfacial reactions of FeNi/SnZn and Ni/Sn-xZn under thermal loading were also investigated. Polarity effect on the interfacial reactions from high-density electric currents was investigated in a eutectic Sn-9Zn/Cu interconnect with a large disparity in the effective charge between the solder constituents. A reverse polarity effect was found where the intermetallic compound (IMC) layer at the cathode grew significantly thicker than that at the anode under electric loading. Such an abnormal polarity effect was shown to result from electromigrations of Sn and Zn along opposite directions as dictated by the disparity in their effective charges. As Sn migrated to the anode under electron wind force, the resulting back stress drove Zn atoms to drift to the cathode. A kinetic analysis of the Zn mass transport explained the differential growth of the IMCs at the two electrodes. The relationship between IMCs at the interfaces and current direction for Ni/Sn-9Zn/Cu combination was investigated. When the electrons traveled from the Ni side to the Cu side, uniform layers of Ni5Zn21 and Cu5Zn8 were formed at the Ni/SnZn and Cu/SnZn interfaces. However, upon reversing the current direction, where electron flow went from the Cu side to the Ni side, thicker Cu6Sn5 phase replaced Ni5Zn21 phase at the Ni/SnZn interface, whereas at the Cu/SnZn interface, thicker β-CuZn phase replaced the γ-Cu5Zn8 phase. A kinetic model, based on the Zn and Cu mass transport in the sample, was presented to explain the growth of the IMC at the anode and cathode. A new method has been developed to restrain the electromigration in SnBi solder interconnects. By introducing prestrains into the solder joints, Bi interfacial segregation under current stressing was effectively retarded. After prestraining of the SnAgCu solder joints, no polarity effect was found in that the IMC layer at the anode has the same growth rate as the cathode. Therefore prestrain treatment provides an effective approach to restrain the electromigration in the solder interconnects. Such an inhibiting effect indicated that dislocations acted as internal “traps” for electromigration damage rather than fast migration paths as expected from a vacancy mechanism. Polarity effect on the interfacial reactions under high-density electric currents was investigated in the Cu/FeNi/Sn/FeNi/Cu solder interconnects. A reverse polarity effect was found where the FeSn2 IMC layer at the cathode grew significantly thicker than that at the anode under electric loading. Such an abnormal polarity effect was shown to result from electromigrations of Fe along opposite directions of electron flow. In the same time, a Cu-rich layer arose next to the FeSn2 layer at the anode side. A kinetic analysis of the Fe and Cu mass transport explained the differential growth of the IMCs at the two electrodes. Interfacial reactions and growth kinetics of IMC layers formed between Sn-9Zn solder and electroplated Fe-42Ni metallization were investigated at 120, 150 and 170 oC for up to 360 h. Experimental results show that the IMC formed at the interface was mainly δ-FeZn8.87 phase, not the FeSn2 phase. The reason is that the attraction between Zn and Fe is stronger than that of Sn and Fe. The growth exponent n for δ-FeZn8.87 phase was found to be about 0.5, which indicates that it grows by a diffusion-controlled process even at a very high temperature. The activation energy for the growth of δ-FeZn8.87 phase was determined to be 42 KJ/mol, in good agreement with the reported data. Nickel is widely used as a solderable diffusion barrier in several types of surface finishes for components and printed circuit boards. Upon reflow and in aging, Sn-Ni intermetallic and P-rich layers form at the interface and degrade the reliability of the solder joints if not controlled. So it would be desirable to limit the growth of Ni-Sn IMC and the P-rich layer. In our study, we found that the typical Ni-Sn reaction product, Ni3Sn4 phase, was substantially changed by adding small amounts of Zn in Sn. With Zn addition, the ternary Ni4(Sn1-x,Znx) phase, rather than the common Ni3Sn4 compound, formed at the interface during reflow and aging. In the Ni4(Sn1-x,Znx) phase, the lattice parameters contracted with increasing Zn content, in agreement with the Vegard’s law. Since diffusion of the reactive species through the denser ternary IMC was more difficulty than through the binary Ni3Sn4, the Zn-containing solder showed a much slower electroless Ni-P consumption rate than Sn.
页数160
语种中文
文献类型学位论文
条目标识符http://ir.imr.ac.cn/handle/321006/17241
专题中国科学院金属研究所
推荐引用方式
GB/T 7714
张新房. 电场与热场下无铅焊料的界面反应[D]. 金属研究所. 中国科学院金属研究所,2009.
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