Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD

doi:10.1016/j.jnoncrysol.2021.121378

IMR OpenIR

	Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD
	Liu, Housheng 1,2; Tariq, Naeem ul Haq 3; Jing, Weichen 1,2; Cui, Xinyu 1; Tang, Mingqiang 1; Xiong, Tianying 1
通讯作者	Tang, Mingqiang(mqtang@imr.ac.cn) ; Xiong, Tianying(tyxiong@imr.ac.cn)
	2022-03-01
发表期刊	JOURNAL OF NON-CRYSTALLINE SOLIDS
ISSN	0022-3093
卷号	579 页码:7
摘要	In this study, silicon oxycarbide (SiOC) glass coatings were successfully deposited by thermal metal organic chemical vapor deposition (MOCVD). The composition, chemical bonding and mechanical properties of the prepared SiOC glass coatings were studied using X-ray photoelectron spectroscopy (XPS) and nano indentation techniques. The surface morphologies of SiOC coatings were characterized by field emission scanning electron microscopy (FESEM) before and after etching with HF acid for prolong time. The results showed that the percentage of Si-C bonds in SiOC glass coatings increases with increasing the content of HMDS in liquid precursors mixture. Raman spectroscopy results revealed the presence of amorphous carbon (with high content of sp3 bonds) in the prepared SiOC coatings. Consequently, the hardness and modulus of SiOC glass coatings increased from 8.99 GPa and 82.6 GPa to 17.93 GPa and 195.6 GPa, respectively. Further, the prepared SiOC glass coatings exhibited excellent corrosion resistance against HF acid.
关键词	SiOC coatings MOCVD Hardness and modulus HF etch resistance
资助者	National Key Research and Development Project
DOI	10.1016/j.jnoncrysol.2021.121378
收录类别	SCI
语种	英语
资助项目	National Key Research and Development Project[2019YFB2005302]
WOS研究方向	Materials Science
WOS类目	Materials Science, Ceramics ; Materials Science, Multidisciplinary
WOS记录号	WOS:000754680200001
出版者	ELSEVIER
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/173337
专题	中国科学院金属研究所
通讯作者	Tang, Mingqiang; Xiong, Tianying
作者单位	1.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 3.Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan
推荐引用方式 GB/T 7714	Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,et al. Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2022,579:7.
APA	Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,Cui, Xinyu,Tang, Mingqiang,&Xiong, Tianying.(2022).Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD.JOURNAL OF NON-CRYSTALLINE SOLIDS,579,7.
MLA	Liu, Housheng,et al."Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD".JOURNAL OF NON-CRYSTALLINE SOLIDS 579(2022):7.