| Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor | |
| Gao, Li-Yin1,2; Liu, Zhi-Quan1,2,3 | |
| Corresponding Author | Liu, Zhi-Quan(lygaolls@alum.imr.ac.cn) |
| 2022-04-01 | |
| Source Publication | IEEE TRANSACTIONS ON MAGNETICS
 |
| ISSN | 0018-9464 |
| Volume | 58Issue:4Pages:7 |
| Abstract | Due to outstanding magnetic properties, low cost, and high efficiency, electroplated Fe-Ni films were the most common magnetic core materials for inductors. In order to meet the requirement of a high-frequency on-chip microinductor in advanced 3-D electronic packaging, the properties of Fe-Ni films electroplated by a modified Watt type electrolyte with different concentrations of FeSO4 center dot 7H(2)O were investigated. Key magnetic properties, including saturated magnetic induction (B-s), coercivity (H-c), and resistivity (rho) were measured, which were 0.98-1.62 T, 0.6-5.6 Oe, and 17.2-33.4 mu Omega.cm, respectively. Both B-s and rho increased monotonically when the content of Fe within the films increased, which was similar to the bulk state Fe-Ni alloys. The H-c first decreased from 5.6 to 0.6 Oe, then fluctuated at the range of 0.6-2.2 Oe when the Fe content increased. As revealed in transmission electron microscopy (TEM) observation, the Fe-Ni films with face-centered cubic (fcc) structure are consist of nanograins with an average grain size of 5-10 nm, resulting in an ultralow H-c. The electroplated nanocrystalline Fe-Ni film (Fe 45 wt%) was further used as magnetic core materials due to its high B-s and rho value. In addition, it was proven that the as-fabricated Fe-Ni microinductor possessed a high inductance of 75 nH and a quality factor of 5 at 30 MHz, respectively. In summary, through composition and microstructure optimization of Fe-Ni films, the quality and working frequency of the microinductor were both improved. |
| Keyword | Fe-Ni magnetic core magnetic properties nanocrystalline on-chip microinductor |
| Funding Organization | Guangdong Shenzhen Joint Fund Youth Project ; Shenzhen Institute of Advanced Technology (SIAT) Innovation Program for Excellent Young Researchers |
| DOI | 10.1109/TMAG.2022.3144488 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | Guangdong Shenzhen Joint Fund Youth Project[2019A1515110771] ; Shenzhen Institute of Advanced Technology (SIAT) Innovation Program for Excellent Young Researchers |
| WOS Research Area | Engineering ; Physics |
| WOS Subject | Engineering, Electrical & Electronic ; Physics, Applied |
| WOS ID | WOS:000792917600021 |
| Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/174087 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Liu, Zhi-Quan |
| Affiliation | 1.Chinese Acad Sci, IShenzhen Inst Adv Elect Mat, Shenzhen Inst Adv Technol, Shenzhen 518055, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China 3.Univ Chinese Acad Sci, Shenzhen Coll Adv Technol, Shenzhen 518055, Peoples R China |
| Recommended Citation GB/T 7714 | Gao, Li-Yin,Liu, Zhi-Quan. Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor[J]. IEEE TRANSACTIONS ON MAGNETICS,2022,58(4):7. |
| APA | Gao, Li-Yin,&Liu, Zhi-Quan.(2022).Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor.IEEE TRANSACTIONS ON MAGNETICS,58(4),7. |
| MLA | Gao, Li-Yin,et al."Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor".IEEE TRANSACTIONS ON MAGNETICS 58.4(2022):7. |
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