Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices

doi:10.1016/j.compositesb.2022.110170

IMR OpenIR

	Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices
	Liang, Fei 1,2; Wang, Zhe-Xuan 3; Zhang, Bin 3; Luo, Xue-Mei 1; Zhang, Guang-Ping 1
通讯作者	Zhang, Bin(zhangb@atm.neu.edu.cn) ; Zhang, Guang-Ping(gpzhang@imr.ac.cn)
	2022-08-15
发表期刊	COMPOSITES PART B-ENGINEERING
ISSN	1359-8368
卷号	243 页码:12
摘要	The application of LIGA Ni and nanocrystalline binary Ni-X(X = W, Mo, Fe) alloys in the micro-electromechanical systems is severely limited due to their strength and ductility trade-off at elevated temperatures. Aiming at such a problem, here we designed Ni/Ni-W laminated nanocomposites with heterogeneous interfaces, and investigated their mechanical behavior at 400 degrees C. We found that the strength of the laminated nanocomposites with different thickness ratios of Ni layers to Ni-W layers at 400 degrees C could reach 400-620 MPa, being two to three times larger than that of traditional LIGA Ni, and their elongation to failure is above or equal to 10%. Introduced heterogeneous interfaces greatly improved the high-temperature tensile properties through the transition of the grain growth direction in the Ni layers from deposition direction to the loading direction and the geometrically constrained premature failure of relaxed Ni-W layers. These findings can offer a potential opportunity to apply the heterogeneous nanocomposites in the field of high-temperature micro-electro-mechanical system devices.
关键词	MEMS Laminated nanocomposites Strength Interface Ni-W alloy High temperature
资助者	National Natural Science Foundation of China (NSFC) ; Fundamental Research Project of Shenyang National Laboratory for Materials Science
DOI	10.1016/j.compositesb.2022.110170
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China (NSFC)[51971060] ; National Natural Science Foundation of China (NSFC)[52171128] ; Fundamental Research Project of Shenyang National Laboratory for Materials Science[L2019R18]
WOS研究方向	Engineering ; Materials Science
WOS类目	Engineering, Multidisciplinary ; Materials Science, Composites
WOS记录号	WOS:000841239200001
出版者	ELSEVIER SCI LTD
引用统计	被引频次：14[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/174510
专题	中国科学院金属研究所
通讯作者	Zhang, Bin; Zhang, Guang-Ping
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 3.Northeastern Univ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Minist Educ, 3-11 Wenhua Rd, Shenyang 110819, Peoples R China
推荐引用方式 GB/T 7714	Liang, Fei,Wang, Zhe-Xuan,Zhang, Bin,et al. Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices[J]. COMPOSITES PART B-ENGINEERING,2022,243:12.
APA	Liang, Fei,Wang, Zhe-Xuan,Zhang, Bin,Luo, Xue-Mei,&Zhang, Guang-Ping.(2022).Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices.COMPOSITES PART B-ENGINEERING,243,12.
MLA	Liang, Fei,et al."Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices".COMPOSITES PART B-ENGINEERING 243(2022):12.