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激光诱导廉价大分子有机硅制备Si_3N_4/SiC等复合陶瓷粉可行性研究
李亚利
学位类型硕士
导师梁勇
1991
学位授予单位中国科学院金属研究所
学位授予地点中国科学院金属研究所
关键词激光 超细粉 气相合成 有机硅
摘要本文以激光法的工业应用为背景,针对激光法制备超细陶瓷粉原料成本高的问题,进行了选取廉价含硅有机物为原料制备Si_3N_4/SiC等复合陶瓷粉的可行性研究。文章中通过对激光法特点的研究,找出了激光法对反应物的选择条件,按选择条件对大量有机硅试制进行了调研、筛选,选出了一些廉价的有机硅原料。针对液态反应物的气流输入问题,自行设计研制出气流稳定,可控的气化装置。实验中采用2KWCO_2激光器、公斤级制粉装置和自行设计的气化装置,以六甲基乙硅胺((Me_3Si)_2NH)和氨气为反应物,制备出Si_3N_4/SiC复合超细粉,证实了用大分子有机硅制备陶瓷复合粉末的可行性。在制备Si_3N_4/SiC复合粉实验中,选用正交设计的工艺参数,进行了提高Si_3N_4/SiC粉末主相Si_3N_4含量的优化实验,制备出形态规则,粒度分布范围等、无烧结性团聚,平均粒径为20nm,Si_3N_4含量为71%的Si_3N_4/SiC陶瓷粉末,并选出最佳实验工艺参数。在制备SiC/SiO_2复合粉实验中,选用二甲基二乙氧基硅烷((CH_3)_2Si(OC_2H_5)_2)为反应物,分别与乙烯和氧气反应,制备出主相含量不同的SiC/SiO_2陶瓷粉末,证实了用大分子有机硅合成SiC/SiO_2粉的可行性。文章最后针对大分子有机硅反应中反应温度低,粉体化学组成随激光功率密度变化敏感等特点,对反应机制进行了探讨,提出红外多光子光化学反应的观点。
其他摘要In this paper, for the purpose of industrial application of laser method, aimed to the question of high price of raw materials used in laser method to synthesis ceramic ultrafine powders, practicability research work has been done to choose cheap silicon containing organic compound to synthesis composite ceramic powders such as Ni_3N_4/SiC. In the article, through the study of characters of laser method, we have found the conditions which the reactant should satisfy with, and through the investigation and screen of great number of organic silanes, we have selected out some cheap organic silanes. Aimed to the question of gas flow inlet of liquid reactant, we have designed an evaporation apparatus which can produce steady and controllable gas flow. On the equipment of 2kwCO_2 laser, kilogram/day powder production rate apparatus and evaporation apparatus designed, using hexamethyldisilazan ((Me_3Si)_2NH) and ammonia as reactants, we have prepared Si_3N_4/SiC composite ultrafine powders, so that we have verified the practicability to use large molecular organic silanes to prepare composite ceramic powders. By using orthogonal experiment parameters, we have prepared high quality Si_2N_4/SiC powders which have regular shape, narrow size distribution, no agglormeration, average particle size of 20nm, Si_3N_4 content of 71%, and found the optimum experiment parameters. We have also used diethoxydimethylsilane ((CH_3)_2Si (OC_2H_5)_2) as reactant, adding ethane and oxygen respectively, having prepared SiC/SiO_2 powders having two different content of main phases, so that we have verified the practicability to use organic silanes to prepare SiC/SiO_2 powders. Through the analysis of the reaction characters of large molecular organic silanes such as low reaction temperature, the sensitive dependence of powder chemical composition on laser power, we have studied the reaction mechanism and presented the view of infrared multiple photon chemical reaction.
页数56
语种中文
文献类型学位论文
条目标识符http://ir.imr.ac.cn/handle/321006/17511
专题中国科学院金属研究所
推荐引用方式
GB/T 7714
李亚利. 激光诱导廉价大分子有机硅制备Si_3N_4/SiC等复合陶瓷粉可行性研究[D]. 中国科学院金属研究所. 中国科学院金属研究所,1991.
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