Synthesis and characterization of ZrCx coatings with different stoichiometry

doi:10.1016/j.vacuum.2022.111211

IMR OpenIR

	Synthesis and characterization of ZrCx coatings with different stoichiometry
	Chen, Lina 1,2; Lei, Yiming 1; Zhang, Jie 1; Wang, Jingyang 1
通讯作者	Zhang, Jie(jiezhang@imr.ac.cn)
	2022-08-01
发表期刊	VACUUM
ISSN	0042-207X
卷号	202 页码:9
摘要	A primary characteristic of zirconium carbide lies in a tolerance on carbon deficiency which is significant for its performance. In this work, ZrC(x )coatings with controlled stoichiometry (x = 0.49-1.00) were deposited by magnetron sputtering. Based on the results of XRD, Raman, SEM, XPS and TEM, the effects of carbon content on lattice constant and microstructure were revealed. The actual residual stress in ZrCx coatings were detected by XRD-sin(2)psi w method, which analyzed the lattice parameters in stress-free state and assisted to investigate the lattice constants variation with carbon content. ZrC(x )coatings remained the NaCl structure with the carbon content varied from 33 at.% to 50 at.%. The ZrCx coatings with low C content exhibited granular grains while the coatings with high C content exhibited a typical columnar grains. Both hardness and modulus firstly increased and then decreased with increasing C/Zr ratio, the maximum value of 24.1 GPa and 432 GPa with ZrC0.86 were identified.
关键词	Zirconium carbide coatings Carbon deficiency Magnetron sputtering
资助者	National Key R&D Program of China ; National Natural Science Founda-tion of China
DOI	10.1016/j.vacuum.2022.111211
收录类别	SCI
语种	英语
资助项目	National Key R&D Program of China[2017YFB0703201] ; National Natural Science Founda-tion of China[51772302]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号	WOS:000855564400002
出版者	PERGAMON-ELSEVIER SCIENCE LTD
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/175486
专题	中国科学院金属研究所
通讯作者	Zhang, Jie
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Chen, Lina,Lei, Yiming,Zhang, Jie,et al. Synthesis and characterization of ZrCx coatings with different stoichiometry[J]. VACUUM,2022,202:9.
APA	Chen, Lina,Lei, Yiming,Zhang, Jie,&Wang, Jingyang.(2022).Synthesis and characterization of ZrCx coatings with different stoichiometry.VACUUM,202,9.
MLA	Chen, Lina,et al."Synthesis and characterization of ZrCx coatings with different stoichiometry".VACUUM 202(2022):9.