| Synthesis and characterization of ZrCx coatings with different stoichiometry | |
| Chen, Lina1,2; Lei, Yiming1; Zhang, Jie1; Wang, Jingyang1 | |
| Corresponding Author | Zhang, Jie(jiezhang@imr.ac.cn) |
| 2022-08-01 | |
| Source Publication | VACUUM
 |
| ISSN | 0042-207X |
| Volume | 202Pages:9 |
| Abstract | A primary characteristic of zirconium carbide lies in a tolerance on carbon deficiency which is significant for its performance. In this work, ZrC(x )coatings with controlled stoichiometry (x = 0.49-1.00) were deposited by magnetron sputtering. Based on the results of XRD, Raman, SEM, XPS and TEM, the effects of carbon content on lattice constant and microstructure were revealed. The actual residual stress in ZrCx coatings were detected by XRD-sin(2)psi w method, which analyzed the lattice parameters in stress-free state and assisted to investigate the lattice constants variation with carbon content. ZrC(x )coatings remained the NaCl structure with the carbon content varied from 33 at.% to 50 at.%. The ZrCx coatings with low C content exhibited granular grains while the coatings with high C content exhibited a typical columnar grains. Both hardness and modulus firstly increased and then decreased with increasing C/Zr ratio, the maximum value of 24.1 GPa and 432 GPa with ZrC0.86 were identified. |
| Keyword | Zirconium carbide coatings Carbon deficiency Magnetron sputtering |
| Funding Organization | National Key R&D Program of China ; National Natural Science Founda-tion of China |
| DOI | 10.1016/j.vacuum.2022.111211 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | National Key R&D Program of China[2017YFB0703201] ; National Natural Science Founda-tion of China[51772302] |
| WOS Research Area | Materials Science ; Physics |
| WOS Subject | Materials Science, Multidisciplinary ; Physics, Applied |
| WOS ID | WOS:000855564400002 |
| Publisher | PERGAMON-ELSEVIER SCIENCE LTD |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/175486 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Zhang, Jie |
| Affiliation | 1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China |
| Recommended Citation GB/T 7714 | Chen, Lina,Lei, Yiming,Zhang, Jie,et al. Synthesis and characterization of ZrCx coatings with different stoichiometry[J]. VACUUM,2022,202:9. |
| APA | Chen, Lina,Lei, Yiming,Zhang, Jie,&Wang, Jingyang.(2022).Synthesis and characterization of ZrCx coatings with different stoichiometry.VACUUM,202,9. |
| MLA | Chen, Lina,et al."Synthesis and characterization of ZrCx coatings with different stoichiometry".VACUUM 202(2022):9. |
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