Capture the early stage of shear banding for bulk metallic glass sheet for MEMS applications

doi:10.1016/j.measurement.2022.111816

IMR OpenIR

	Capture the early stage of shear banding for bulk metallic glass sheet for MEMS applications
	Li, Diao-Feng; Li, Nan; Bai, Chun-Guang; Zhang, Zhi-Qiang; Zhao, Jian; Yang, Rui
通讯作者	Bai, Chun-Guang(cgbai@imr.ac.cn)
	2022-10-01
发表期刊	MEASUREMENT
ISSN	0263-2241
卷号	202 页码:10
摘要	Bulk metallic glasses (BMGs) are a class of promising candidate materials which applied in Micro-electromechanical Systems (MEMS). However, a suitable mechanical parameter and an effective measurement approach are still lacked to characterize the onset of plastic deformation exactly for BMG sheets in bending. In this work, bending proof strength with permanent strain at the level of 0.005% (sigma(P,0.005%)) was proposed to represent the exactly onset of yielding for BMG sheets. This mechanical parameter was measured by a series of stepwise cyclic loading-unloading tests, which are particular suitable for timely capture the earlier stage of shear banding for BMG sheets within MEMS scale, thus showing the significant superiorities to monotonic loading test and conventional cyclic tests which needed to be equipped with the deflectometers. The sigma(P,0.005%) of Zr61Ti2C-u(25)Al(12) (ZT1) BMG sheet with thickness of 100 mu m was determined to be 1900+10 MPa, and physically cor-relates to the propagation stress of embryonic shear band instead of the nucleation stress. In addition, a quantitative correlation between permanent strain and shear offsets on BMG sheet surface has established, thus the permanent strain of thinner BMG sheets can be attained by a simple approach, and without relying on the conventional contact-type deflectometers with high accuracy. The sigma(P,0.005%) can be used as a more reliable and rational design parameter for thinner BMG sheets which applied in MEMS fields.
关键词	Bulk metallic glasses Bending proof strength Permanent strain MEMS
资助者	National Key Research and Development Program of China
DOI	10.1016/j.measurement.2022.111816
收录类别	SCI
语种	英语
资助项目	National Key Research and Development Program of China[2017YFB0306201]
WOS研究方向	Engineering ; Instruments & Instrumentation
WOS类目	Engineering, Multidisciplinary ; Instruments & Instrumentation
WOS记录号	WOS:000890173400005
出版者	ELSEVIER SCI LTD
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/176047
专题	中国科学院金属研究所
通讯作者	Bai, Chun-Guang
作者单位	Chinese Acad Sci, Shichangxu Innovat Ctr Adv Mat, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,et al. Capture the early stage of shear banding for bulk metallic glass sheet for MEMS applications[J]. MEASUREMENT,2022,202:10.
APA	Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,Zhang, Zhi-Qiang,Zhao, Jian,&Yang, Rui.(2022).Capture the early stage of shear banding for bulk metallic glass sheet for MEMS applications.MEASUREMENT,202,10.
MLA	Li, Diao-Feng,et al."Capture the early stage of shear banding for bulk metallic glass sheet for MEMS applications".MEASUREMENT 202(2022):10.