| Support compliance: A non-ignorable factor for cantilever sensors for MEMS application | |
| Li, Diao-Feng; Li, Nan; Bai, Chun-Guang; Zhang, Zhi-Qiang; Zhao, Jian | |
| Corresponding Author | Bai, Chun-Guang(cgbai@imr.ac.cn) |
| 2022-10-16 | |
| Source Publication | SENSORS AND ACTUATORS A-PHYSICAL
 |
| ISSN | 0924-4247 |
| Volume | 346Pages:4 |
| Abstract | Support compliance at the fixed end of cantilever beams has significant effects on the measured modulus of elasticity in bending (Eb) and accurate deflection response. Additional deflection caused by support compliance is an easily neglected but an inevitable factor, which results in the large errors of the measured Eb. An effective strategy to design cantilever sensors was proposed by enhancing the loading distance, which not only improve the sensitivity, but also weaken the support compliance effect. In a nutshell, the support compliance effect must be taken into accounted by engineers carefully to improve the accuracy of the measured Eb and deflection response for cantilever sensors which used in MEMS. |
| Keyword | Cantilever beam Support compliance Elastic properties Metallic glass MEMS |
| Funding Organization | National Key Research and Devel- opment Program of China |
| DOI | 10.1016/j.sna.2022.113867 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | National Key Research and Devel- opment Program of China ; [2017YFB0306201] |
| WOS Research Area | Engineering ; Instruments & Instrumentation |
| WOS Subject | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
| WOS ID | WOS:000876009300005 |
| Publisher | ELSEVIER SCIENCE SA |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/176520 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Bai, Chun-Guang |
| Affiliation | Chinese Acad Sci, Inst Met Res, Shi Changxu Innovat Ctr Adv Mat, 72 Wenhua Rd, Shenyang 110016, Peoples R China |
| Recommended Citation GB/T 7714 | Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,et al. Support compliance: A non-ignorable factor for cantilever sensors for MEMS application[J]. SENSORS AND ACTUATORS A-PHYSICAL,2022,346:4. |
| APA | Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,Zhang, Zhi-Qiang,&Zhao, Jian.(2022).Support compliance: A non-ignorable factor for cantilever sensors for MEMS application.SENSORS AND ACTUATORS A-PHYSICAL,346,4. |
| MLA | Li, Diao-Feng,et al."Support compliance: A non-ignorable factor for cantilever sensors for MEMS application".SENSORS AND ACTUATORS A-PHYSICAL 346(2022):4. |
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