Mechanical properties evaluation of diamond films via nanoindentation

doi:10.1016/j.diamond.2022.109403

IMR OpenIR

	Mechanical properties evaluation of diamond films via nanoindentation
	Xiong, Jiaji 1,2; Liu, Lusheng 1; Song, Haozhe 1; Wang, Mengrui 1,3; Hu, Tianwen 1; Zhai, Zhaofeng 1; Yang, Bing 1; Jiang, Xin 1; Huang, Nan 1,2
通讯作者	Jiang, Xin(xjiang@imr.ac.cn) ; Huang, Nan(nhuang@imr.ac.cn)
	2022-12-01
发表期刊	DIAMOND AND RELATED MATERIALS
ISSN	0925-9635
卷号	130 页码:9
摘要	Diamond film is considered ideal tool coating material for processing difficult-to-machine materials due to the high hardness and wear resistance. However, precisely evaluating the mechanical properties of diamond films has been a considerable obstacle, which hinders further design and application. In this work, various diamond films were deposited on cemented carbide substrates ranging from 0.1 to 1.0 kPa in CH4/H2 by hot filament chemical vapor deposition. The mechanical properties of diamond films were systematically and rigorously evaluated by nanoindentation adopting a series of loads. However, it is found that hardness calculated at different loads has a significant deviation, although all obey the well-known 10 % rule of thumb. On basis of the massive nanoindentation on polished diamond film with roughness <20 nm, we propose a stricter 5 %, instead of the well-known 10 % rule of thumb, for the limit of maximum penetration depth divided by film thickness in the diamond nanoindentation measurements. Notably, the mechanical properties of the deposited diamond films improved as the pressure increased, especially hardness gradually increased from 75.5 +/- 1.4 GPa to 87.3 +/- 5.0 GPa, which is attributed to the increase of the ratio of sp3 carbon content.
关键词	Diamond film Nanoindentation Hardness Elastic modulus Hot filament CVD
资助者	STS project of the Fujian Province ; Instrument Development Project of Shenyang National Laboratory for Materials Science ; Chinese Academy of Sciences
DOI	10.1016/j.diamond.2022.109403
收录类别	SCI
语种	英语
资助项目	STS project of the Fujian Province ; Instrument Development Project of Shenyang National Laboratory for Materials Science[L2020E08] ; Chinese Academy of Sciences[2020T3001]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000880016900002
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/176591
专题	中国科学院金属研究所
通讯作者	Jiang, Xin; Huang, Nan
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Wenhua Rd 72, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Wenhua Rd 72, Shenyang 110016, Peoples R China 3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
推荐引用方式 GB/T 7714	Xiong, Jiaji,Liu, Lusheng,Song, Haozhe,et al. Mechanical properties evaluation of diamond films via nanoindentation[J]. DIAMOND AND RELATED MATERIALS,2022,130:9.
APA	Xiong, Jiaji.,Liu, Lusheng.,Song, Haozhe.,Wang, Mengrui.,Hu, Tianwen.,...&Huang, Nan.(2022).Mechanical properties evaluation of diamond films via nanoindentation.DIAMOND AND RELATED MATERIALS,130,9.
MLA	Xiong, Jiaji,et al."Mechanical properties evaluation of diamond films via nanoindentation".DIAMOND AND RELATED MATERIALS 130(2022):9.