Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices

doi:10.1016/j.jmst.2022.08.008

IMR OpenIR

	Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices
	Wang, Zhe-Xuan 1; Liang, Fei 2; Zhang, Guang-Ping 2; Zhang, Bin 1
通讯作者	Zhang, Guang-Ping(gpzhang@imr.ac.cn) ; Zhang, Bin(zhangb@atm.neu.edu.cn)
	2023-03-01
发表期刊	JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN	1005-0302
卷号	138 页码:129-137
摘要	There is an increasing demand for materials with excellent mechanical performance for Micro-Electro-Mechanical System (MEMS) devices serving at elevated temperatures. However, how to enhance the high-temperature strength of the materials without losing their plasticity is a pending problem. Here, the Ni/Ni-W laminated composites with different monolayer thicknesses and the same ratio of the con-stituent layer thicknesses were fabricated successfully by using the dual-bath electrodeposition technique. The microstructure stability and tensile properties of annealed Ni/Ni-W laminated composites with dif-ferent monolayer thicknesses were investigated at 400 degrees C. The results show that the annealed Ni0.5/Ni-W0.05 laminated composites have both high yield strength (450 MPa) and excellent elongation to failure (25.1%) at 400 degrees C, being superior to that of the monotonic Ni (179 MPa and 17.7%). Such a high strength of the laminated composite at 400 degrees C results from the contribution of the intrinsically high strength of the Ni-W layers with excellent thermal stability, the thickness-constrained effect on grain growth of Ni layers and the interface coupling effect of heterogeneous structures. The good plasticity may be derived from the heterogeneous laminated structure and the decrease in the constituent layer thickness, provid-ing a good co-deformation ability. Basic mechanisms for the high tensile strength and good plasticity of the Ni/Ni-W laminated composites at 400 degrees C were analyzed theoretically. The findings reveal a poten-tial strategy to fabricate MEMS components with excellent high-temperature tensile properties through tailoring the microstructure thermal stability and the constituent layer scale.(c) 2022 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
关键词	Laminated composites MEMS Strength Plasticity High temperature
资助者	National Natural Science Foundation of China ; Fundamen- tal Research Project of Shenyang National Laboratory for Materials Science
DOI	10.1016/j.jmst.2022.08.008
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China ; Fundamen- tal Research Project of Shenyang National Laboratory for Materials Science ; [51971060] ; [L2019R18]
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000884395400004
出版者	JOURNAL MATER SCI TECHNOL
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/176693
专题	中国科学院金属研究所
通讯作者	Zhang, Guang-Ping; Zhang, Bin
作者单位	1.Northeastern Univ, Sch Mat Sci & Engn, Minist Educ, Key Lab Anisotropy & Texture Mat, Shenyang 110819, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Wang, Zhe-Xuan,Liang, Fei,Zhang, Guang-Ping,et al. Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2023,138:129-137.
APA	Wang, Zhe-Xuan,Liang, Fei,Zhang, Guang-Ping,&Zhang, Bin.(2023).Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,138,129-137.
MLA	Wang, Zhe-Xuan,et al."Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 138(2023):129-137.