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Coercivity mechanism and microstructure evolution of perpendicular magnetic anisotropic Nd-Fe-B thick films annealed by pulsed laser
Liu, S.1,2; Zhao, X. T.1; Liu, L.1; Liu, W.1; Li, C. H.1,2; Ma, J.1,2; Li, D.1; Zhang, Z. D.1
通讯作者Zhao, X. T.(xtzhao@imr.ac.cn) ; Liu, W.(wliu@imr.ac.cn)
2025-03-15
发表期刊JOURNAL OF ALLOYS AND COMPOUNDS
ISSN0925-8388
卷号1020页码:8
摘要Pulsed laser annealing provides an effective solution to reduce the processing temperature of Nd-Fe-B thick films, which ensures compatibility with semiconductor processes and promotes its wide application in microelectromechanical systems. In this work, Nd-Fe-B thick films with a strong perpendicular magnetic anisotropy and a high magnetization are deposited at a processing temperature of 450 degrees C using a localized thermal treatment with an infrared pulsed laser. It is found that the c-axis columnar textures extending from the capping layer to the buffer layer are formed by the laser annealing. A micro-scale growth model for laser-annealed Nd-Fe-B thick films is established based on the relationship between their microstructure and magnetic properties. The evolution of magnetic domains and the first-order reversal curve indicate that the coercivity mechanism of the laser-annealed Nd-Fe-B thick films is primarily dominated by the nucleation, and the magnetic interaction is dominated by the dipole interaction. This work improves the low-temperature compatibility of Nd-Fe-B thick film deposition processes and promotes its application in microelectromechanical systems.
关键词Nd-Fe-B thick film Laser annealing Perpendicular magnetic anisotropy Coercivity mechanism
资助者National Key R & D Program of China ; National Nature Science Foundation of China
DOI10.1016/j.jallcom.2025.179379
收录类别SCI
语种英语
资助项目National Key R & D Program of China[2023YFB3507301] ; National Key R & D Program of China[2021YFB3500303] ; National Key R & D Program of China[2023YFB3507600] ; National Nature Science Foundation of China[52031014] ; National Nature Science Foundation of China[51971219]
WOS研究方向Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号WOS:001436632900001
出版者ELSEVIER SCIENCE SA
引用统计
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/179775
专题中国科学院金属研究所
通讯作者Zhao, X. T.; Liu, W.
作者单位1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China
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GB/T 7714
Liu, S.,Zhao, X. T.,Liu, L.,et al. Coercivity mechanism and microstructure evolution of perpendicular magnetic anisotropic Nd-Fe-B thick films annealed by pulsed laser[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2025,1020:8.
APA Liu, S..,Zhao, X. T..,Liu, L..,Liu, W..,Li, C. H..,...&Zhang, Z. D..(2025).Coercivity mechanism and microstructure evolution of perpendicular magnetic anisotropic Nd-Fe-B thick films annealed by pulsed laser.JOURNAL OF ALLOYS AND COMPOUNDS,1020,8.
MLA Liu, S.,et al."Coercivity mechanism and microstructure evolution of perpendicular magnetic anisotropic Nd-Fe-B thick films annealed by pulsed laser".JOURNAL OF ALLOYS AND COMPOUNDS 1020(2025):8.
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