Secondary electron emission reduction from boron nitride composite ceramic surfaces by the artificial microstructures and functional coating

doi:10.1088/1361-6463/ad471c

IMR OpenIR

	Secondary electron emission reduction from boron nitride composite ceramic surfaces by the artificial microstructures and functional coating
	Lian,Zhuoxi 1; Xu,Yanan 2; Meng,Xiangchen 1; Wang,Dan 1,3; Chen,Jixin 4; Qi,Kangcheng 5; He,Yongning 1,3
通讯作者	Wang,Dan() ; He,Yongning()
	2024-05-15
发表期刊	Journal of Physics D: Applied Physics
ISSN	0022-3727
卷号	57 期号:31
摘要	Abstract Boron nitride-silicon dioxide (BN–SiO2) composite ceramic is a typical Hall thruster wall material, and its secondary electron emission (SEE) property dominates the sheath characteristics inside the thrusters. Lowering the SEE yield (SEY) of the wall surface can remarkably improve the sheath stability of Hall thrusters. To accomplish the SEY reduction for BN–SiO2, artificial surface microstructure and surface coating technologies are employed. The morphology analysis demonstrated the shape and feature sizes of the microstructure could be largely controlled by adjusting the laser etching parameters. Then we realized an increasingly significant SEY reduction for BN–SiO2 as the average aspect ratio of the microhole increases. The microstructures showed a remarkable SEY reduction when the laser power was 10 W and the scanning cycle was 50. In this case, the SEY peak values (δ m) of the two BN–SiO2 samples with mass ratios of 7:3 and 6:4 decrease from 2.62 and 2.38 to 1.55 and 1.46 respectively. For a further SEY reduction, a sputtering process was employed to deposit TiN film on the microstructures. The results showed that the TiN coating of 246 nm thickness reduced the δ m values of the two samples from 1.55 and 1.46 to 0.82 and 0.76, which achieved a notable SEY reduction compared to the original surface. Via simulation work, the SEY reduction achieved by microstructures was theoretically interpreted. Besides, by considering the effect of surface charging, the results of SEY converged to 1 with the irradiation pulse increasing presented. The research demonstrated a remarkable SEY reduction for BN–SiO2 ceramic by constructing surface microstructure and depositing TiN coating, which has application sense for low SEY engineering in specific working scenarios.
关键词	boron nitride secondary electron emission laser etching titanium nitride
DOI	10.1088/1361-6463/ad471c
语种	英语
WOS记录号	IOP:d_57_31_315304
出版者	IOP Publishing
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/179859
专题	中国科学院金属研究所
通讯作者	Wang,Dan; He,Yongning
作者单位	1.School of Microelectronics, Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China 2.Shanghai Institute of Space Propulsion, Shanghai Engineering Research Center of Space Engine, Shanghai 201112, People’s Republic of China 3.Key Lab of Micro-nano Electronics and System Integration of Xi’an City, Xi’an 710049, People’s Republic of China 4.Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, People’s Republic of China 5.School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610000, People’s Republic of China
推荐引用方式 GB/T 7714	Lian,Zhuoxi,Xu,Yanan,Meng,Xiangchen,et al. Secondary electron emission reduction from boron nitride composite ceramic surfaces by the artificial microstructures and functional coating[J]. Journal of Physics D: Applied Physics,2024,57(31).
APA	Lian,Zhuoxi.,Xu,Yanan.,Meng,Xiangchen.,Wang,Dan.,Chen,Jixin.,...&He,Yongning.(2024).Secondary electron emission reduction from boron nitride composite ceramic surfaces by the artificial microstructures and functional coating.Journal of Physics D: Applied Physics,57(31).
MLA	Lian,Zhuoxi,et al."Secondary electron emission reduction from boron nitride composite ceramic surfaces by the artificial microstructures and functional coating".Journal of Physics D: Applied Physics 57.31(2024).