Failure mechanisms of multilayer TiN films based on mechanical properties of film and substrate

doi:10.1016/j.surfcoat.2024.131012

IMR OpenIR

	Failure mechanisms of multilayer TiN films based on mechanical properties of film and substrate
	Si, Biao 1; Sun, Linfan 1; Zhao, Zhuo 1; Zhou, Yanwen 1; Zhou, Yangtao 2
通讯作者	Zhao, Zhuo(zhaozhuo@ustl.edu.cn) ; Zhou, Yanwen(zhouyanwen1966@163.com)
	2024-07-15
发表期刊	SURFACE & COATINGS TECHNOLOGY
ISSN	0257-8972
卷号	487 页码:8
摘要	The poor adhesion, which is related to the mechanical properties of the substrate and film, leads to the film peeling off from the substrate and failure. In this study, TiN films with various structure were prepared on Ti6Al4V titanium alloy (TC4), 316L stainless steel (316L), 4Cr5MoSiV1 hot work die steel (H13), and W6Mo5Cr4V2 high-speed steel (W6) by adjusting the discharge currents using a hot-wire plasma -enhanced magnetron sputtering rig. The morphologies of the single -layer TiN films varied from loose to dense and ductile to brittle, and the nanohardness and elastic modulus increased as the hot-wire discharge current increased. The morphologies, nanohardnesses, and elastic moduli of the multilayer TiN films gradually approached those of the dense TiN single -layer films as the thicknesses of the top dense layers increased. The results, both by numerical simulation and experimental tests, revealed that the interfacial tensile stress and surface strain of a TiN/substrate system increased as the elastic modulus differences between TiN and its substrate increased, resulting in a serious TiN film elastic and plastic deformation asynchrony and poor film-substrate adhesion. The loose layer between the top dense TiN layer and its substrate acts as a buffer because the elastic modulus of the loose layer is in the middle, higher than that of the substrate but lower than that of the top dense layer. For TiN/TC4 or 316L with large differences in elastic moduli, loose/dense thickness ratios of 1:2 or 1:4 for the multilayer TiN films were sufficient to improve their adhesion. For TiN/H13 or W6, with small elastic modulus differences, a ratio of 1:4 was sufficiently large and may not be necessary.
关键词	Adhesion Synchronous deformation Elastic modulus Mechanical property Film structure
资助者	National Natural Science Foundation of China
DOI	10.1016/j.surfcoat.2024.131012
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[52271056] ; National Natural Science Foundation of China[52102174]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Coatings & Films ; Physics, Applied
WOS记录号	WOS:001257473500001
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/187494
专题	中国科学院金属研究所
通讯作者	Zhao, Zhuo; Zhou, Yanwen
作者单位	1.Univ Sci & Technol Liaoning, Sch Mat & Met, Liaoning Key Lab Nanopowder Fabricat & Applicat, Anshan 114031, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Si, Biao,Sun, Linfan,Zhao, Zhuo,et al. Failure mechanisms of multilayer TiN films based on mechanical properties of film and substrate[J]. SURFACE & COATINGS TECHNOLOGY,2024,487:8.
APA	Si, Biao,Sun, Linfan,Zhao, Zhuo,Zhou, Yanwen,&Zhou, Yangtao.(2024).Failure mechanisms of multilayer TiN films based on mechanical properties of film and substrate.SURFACE & COATINGS TECHNOLOGY,487,8.
MLA	Si, Biao,et al."Failure mechanisms of multilayer TiN films based on mechanical properties of film and substrate".SURFACE & COATINGS TECHNOLOGY 487(2024):8.