Investigation on nanocrystalline diamond film with high hardness

doi:10.1016/j.vacuum.2024.113345

IMR OpenIR

	Investigation on nanocrystalline diamond film with high hardness
	Lan, Jiayi 1; Li, Haixin 1; Zhao, Xiao 3; Liu, Lusheng 2; Li, Yueli 1; Song, Haozhe 2; Huang, Nan 2,4
通讯作者	Li, Haixin(lihaixin@hrbeu.edu.cn) ; Huang, Nan(nhuang@imr.ac.cn)
	2024-08-01
发表期刊	VACUUM
ISSN	0042-207X
卷号	226 页码:8
摘要	Nanocrystalline diamond (NCD) film is widely utilized in cutting tools due to its exceptional mechanical properties, including low surface roughness and good toughness. However, it has been limited by its lower hardness. In this study, the microwave plasma chemical vapor deposition (MPCVD) technique was used to deposit NCD films on tungsten carbide-cobalt (WC -Co) substrates with different CH 4 content. The mechanical properties of NCD films were evaluated using the nanoindentation method. It was found that the hardness of NCD films reached 84 GPa at a low CH 4 content, which is attributed to its high crystal quality, high sp 3 -C content and high compressive stress. The transmission electron microscopy (TEM) was used to examine the cross-sectional microstructure of NCD films. The NCD films with high hardness were found to have partial twinning features such as twinned boundaries (TBs) inhibited dislocation motion, resulting in increased hardness. This work improves the hardness of NCD films and is important to promote the wide application of NCD films in the field of cutting tools.
资助者	Technical Innovation Project for Functional Development of Instruments and Equipment of the Chinese Academy of Sciences ; Science Fund of Shandong Laboratory of Advanced Materials and Green Manufacturing (Yantai)
DOI	10.1016/j.vacuum.2024.113345
收录类别	SCI
语种	英语
资助项目	Technical Innovation Project for Functional Development of Instruments and Equipment of the Chinese Academy of Sciences[sjzx-gnkf-202203] ; Science Fund of Shandong Laboratory of Advanced Materials and Green Manufacturing (Yantai)[AMGM2023F06]
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号	WOS:001263450800001
出版者	PERGAMON-ELSEVIER SCIENCE LTD
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/187841
专题	中国科学院金属研究所
通讯作者	Li, Haixin; Huang, Nan
作者单位	1.Harbin Engn Univ, Yantai Res Inst, 1 Qingdao St, Yantai 264006, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Wenhua Rd 72, Shenyang 110016, Peoples R China 3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China 4.Univ Sci & Technol China, Sch Mat Sci & Engn, Wenhua Rd 72, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Lan, Jiayi,Li, Haixin,Zhao, Xiao,et al. Investigation on nanocrystalline diamond film with high hardness[J]. VACUUM,2024,226:8.
APA	Lan, Jiayi.,Li, Haixin.,Zhao, Xiao.,Liu, Lusheng.,Li, Yueli.,...&Huang, Nan.(2024).Investigation on nanocrystalline diamond film with high hardness.VACUUM,226,8.
MLA	Lan, Jiayi,et al."Investigation on nanocrystalline diamond film with high hardness".VACUUM 226(2024):8.