Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance

doi:10.1016/j.jnoncrysol.2024.123159

IMR OpenIR

	Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance
	Zhang, Yongheng 1,2; Chen, Jixin 1; Zhang, Hao 1,2; Lei, Yiming 1
通讯作者	Chen, Jixin(jxchen@imr.ac.cn)
	2024-10-15
发表期刊	JOURNAL OF NON-CRYSTALLINE SOLIDS
ISSN	0022-3093
卷号	642 页码:7
摘要	Bulk ytterbium aluminosilicate glass was prepared via boron nitride embedding using Yb2O3, Al2O3 and SiO2 powders as raw materials. The glass-forming ability, mechanical properties, thermal properties, optical properties, and plasma etching behavior of the ytterbium aluminosilicate glass were investigated. Among the investigated glass compositions, 15Yb(2)O(3)-25Al(2)O(3)-60SiO(2) (mol.%) has the best glass-forming ability. Its flexural strength, compressive strength, fracture toughness, and elastic modulus were 166 +/- 6 MPa, 1104 +/- 59 MPa, 1.3 +/- 0.1 MPa m(1/2), and 113 +/- 0.1 GPa, respectively. The as-prepared glass exhibited high glass transition temperature (847 degrees C), low thermal conductivity (0.79 W m(-1) K-1 at 25 degrees C) and good thermal stability. Furthermore, the prepared ytterbium aluminosilicate glass showed excellent fluorine plasma etching resistance owing to the generation of low volatility fluorine compounds during etching and excellent resistance to plasma sputtering. The reason for relatively low visible and infrared transmittances of the as-prepared glass was also discussed.
关键词	Ytterbium aluminosilicate glass Bulk materials Embedding method Mechanical properties Plasma etching resistance
资助者	Shenyang National Laboratory for Ma-terials Science, Institute of Metal Research, Chinese Academy of Science
DOI	10.1016/j.jnoncrysol.2024.123159
收录类别	SCI
语种	英语
资助项目	Shenyang National Laboratory for Ma-terials Science, Institute of Metal Research, Chinese Academy of Science
WOS研究方向	Materials Science
WOS类目	Materials Science, Ceramics ; Materials Science, Multidisciplinary
WOS记录号	WOS:001288308000001
出版者	ELSEVIER
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/188961
专题	中国科学院金属研究所
通讯作者	Chen, Jixin
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Yongheng,Chen, Jixin,Zhang, Hao,et al. Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2024,642:7.
APA	Zhang, Yongheng,Chen, Jixin,Zhang, Hao,&Lei, Yiming.(2024).Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance.JOURNAL OF NON-CRYSTALLINE SOLIDS,642,7.
MLA	Zhang, Yongheng,et al."Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance".JOURNAL OF NON-CRYSTALLINE SOLIDS 642(2024):7.