| 脉冲激光溅射沉积PZT膜 | |
| 冯钟潮,赵岩,锺志源 | |
| 1999-10-25 | |
| Source Publication | 应用激光
 |
| Issue | 5Pages:262-264+268 |
| Abstract | 利用脉冲激光溅射沉积ＰＺＴ压电陶瓷薄膜。着重研究了制备过程对膜层成分和结构的控制。 |
| description.department | 中国科学院金属研究所!沈阳 110015 ,中国科学院金属研究所!沈阳 110015 ,香港城市大学!香港 |
| Keyword | 脉冲激光溅射沉积 压电陶瓷 薄膜 |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/27387 |
| Collection | 中国科学院金属研究所 |
| Recommended Citation GB/T 7714 | 冯钟潮,赵岩,锺志源. 脉冲激光溅射沉积PZT膜[J]. 应用激光,1999(5):262-264+268. |
| APA | 冯钟潮,赵岩,锺志源.(1999).脉冲激光溅射沉积PZT膜.应用激光(5),262-264+268. |
| MLA | 冯钟潮,赵岩,锺志源."脉冲激光溅射沉积PZT膜".应用激光 .5(1999):262-264+268. |
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