Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films

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	Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films
	Y. Yang; S. S. Zhao; J. Gong; X. Jiang; C. Sun
	2011
发表期刊	Journal of Materials Science & Technology
ISSN	1005-0302
卷号	27 期号:5 页码:385-392
摘要	(Ti,Al)N films were fabricated by arc on plating (AIP) and then annealed within a range of temperatures from 200 to 500 degrees C for 30 min in vacuum. The results indicate that the average residual stresses decrease slightly from -5.84 to -4.98 GPa with increasing annealing temperature. The stress depth distribution evolves from a sharp "bell" shape to a mild "bell" shape, suggesting a more uniform stress state in the annealed films. The microstructure of the films was also investigated in detail. The as-deposited film consists of fine columnar crystals with an amorphous phase at the interface. During heat treatment, the columnar subgrain growth was observed; meanwhile, the phenomenon of crystallization has been identified at the interface. Further more, the relationship between the residual stresses and the microstructure of the films was explored and highlighted. In addition, there is no hardness degradation of the films during heat treatment.
部门归属	[yang, ying; zhao, shengsheng; gong, jun; sun, chao] chinese acad sci, inst met res, state key lab corros & protect, shenyang 110016, peoples r china. [jiang, xin] univ siegen, inst mat engn, d-57076 siegen, germany.;sun, c (reprint author), chinese acad sci, inst met res, state key lab corros & protect, shenyang 110016, peoples r china;csun@imr.ac.cn
关键词	Arc Ion Plating (Ti Heat Treatment Al)n Microstructure Stress Distribution 0.45 Thin-films Mechanical-properties Hard Coatings Tin Films Pvd Thickness Evaporation Deposition Growth Tools
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WOS记录号	WOS:000291514600001
引用统计	被引频次：19[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/30838
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. Yang,S. S. Zhao,J. Gong,et al. Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films[J]. Journal of Materials Science & Technology,2011,27(5):385-392.
APA	Y. Yang,S. S. Zhao,J. Gong,X. Jiang,&C. Sun.(2011).Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films.Journal of Materials Science & Technology,27(5),385-392.
MLA	Y. Yang,et al."Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films".Journal of Materials Science & Technology 27.5(2011):385-392.