Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition

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	Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition
	W. C. Lang; J. Q. Xiao; J. Gong; C. Sun; R. F. Huang; L. S. Wen
	2010
发表期刊	Vacuum
ISSN	0042-207X
卷号	84 期号:9 页码:1111-1117
摘要	Cathode spot motion and macroparticles (MPs) reduction on related films are the two main issues in the application of the vacuum arc deposition (VAD). In the present work, an axisymmetric magnetic field (AMF) was applied to the cathode surface to investigate the influence of the AMF on the cathode spot motion and the MPs reduction on TiN films. The results show that the AMF affected the cathode spot motion by redistributing the dense plasma connected with the initiation of the new spot. With increasing AMF, there is an increasing tendency for the cathode spot to rotate and drift toward the cathode target edge. Based on the results of FEM simulation and the physical mechanism of the cathode spot discharge, the mechanism of the cathode spot motion in the AMF was discussed. The morphology, detailed size distribution, and roughness of the resultant TiN films were systematically investigated. Fewer and smaller MPs ejection is observed with an increase in the transverse component of AMF. The effect of the AMF on the MPs reduction on TiN films was discussed, and the results were compared with the theoretical predictions. (C) 2010 Elsevier Ltd. All rights reserved.
部门归属	[lang, w. c.; xiao, j. q.; gong, j.; sun, c.; wen, l. s.] chinese acad sci, div surface engn mat, inst met res, shenyang 110016, peoples r china. [lang, w. c.; xiao, j. q.; huang, r. f.] hunan ykh surface engn co ltd, changsha 410013, hunan, peoples r china.;lang, wc (reprint author), chinese acad sci, div surface engn mat, inst met res, shenyang 110016, peoples r china;wclang@imr.ac.cn
关键词	Vacuum Arc Deposition Axisymmetric Magnetic Field Cathode Spot Motion Macroparticles Reduction Pressure
URL	查看原文
WOS记录号	WOS:000277356200007
引用统计	被引频次：31[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/31191
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	W. C. Lang,J. Q. Xiao,J. Gong,et al. Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition[J]. Vacuum,2010,84(9):1111-1117.
APA	W. C. Lang,J. Q. Xiao,J. Gong,C. Sun,R. F. Huang,&L. S. Wen.(2010).Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition.Vacuum,84(9),1111-1117.
MLA	W. C. Lang,et al."Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition".Vacuum 84.9(2010):1111-1117.