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RESIDUAL STRESS AND MAGNETIC PROPERTIES OF Fe-Ga THIN FILMS
B. W. Wang; S. Y. Cao; W. M. Huang; L. Weng; Y. Sun
2010
发表期刊International Journal of Modern Physics B
ISSN0217-9792
卷号24期号:15-16页码:2380-2385
摘要Fe-Ga thin films were prepared by DC magnetron sputtering on Si (100) substrate and an alloy target consisting of Fe(81)Ga(19) was used. X-ray diffraction techniques were used to quantify the strain in the Fe-Ga thin films by measuring the interplanar spacings of select crystallographic planes. The interplanar spacing, d, for the family of Fe-Ga {211} planes was measured. Using the well-established sin(2)psi technique, the residual stress of the Fe-Ga thin films was calculated. It has been found that the stress for Fe-Ga thin films quickly increases with increasing the sputtering power. The residual stress of thin films is almost unchanged in the range of 220-440 nm, and then it decreases with increasing the thickness of thin films.
部门归属[wang, b. w.; cao, s. y.; huang, w. m.; weng, l.; sun, y.] hebei univ technol, res ctr magnet tech & magnet mat, tianjin 300130, peoples r china. [wang, b. w.] acad sinica, int ctr mat phys, shenyang 110015, peoples r china.;wang, bw (reprint author), hebei univ technol, res ctr magnet tech & magnet mat, tianjin 300130, peoples r china;bwwang@hebut.edu.cn
关键词Fe-ga Thin Film Residual Stress Magnetic Property Magnetostriction Magnetostriction Alloys
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WOS记录号WOS:000282197000026
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被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/31490
专题中国科学院金属研究所
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B. W. Wang,S. Y. Cao,W. M. Huang,et al. RESIDUAL STRESS AND MAGNETIC PROPERTIES OF Fe-Ga THIN FILMS[J]. International Journal of Modern Physics B,2010,24(15-16):2380-2385.
APA B. W. Wang,S. Y. Cao,W. M. Huang,L. Weng,&Y. Sun.(2010).RESIDUAL STRESS AND MAGNETIC PROPERTIES OF Fe-Ga THIN FILMS.International Journal of Modern Physics B,24(15-16),2380-2385.
MLA B. W. Wang,et al."RESIDUAL STRESS AND MAGNETIC PROPERTIES OF Fe-Ga THIN FILMS".International Journal of Modern Physics B 24.15-16(2010):2380-2385.
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