Synthesis of aluminum nitride thin films by filtered arc ion plating deposition

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	Synthesis of aluminum nitride thin films by filtered arc ion plating deposition
	X. B. Yan; Y. L. Dong; H. Q. Li; J. Gong; C. Sun
	2010
发表期刊	Materials Letters
ISSN	0167-577X
卷号	64 期号:11 页码:1261-1263
摘要	Thin films of aluminum nitride (AlN) were deposited on stainless steel and glass substrates by a modified deposition technique, filtered arc ion plating, at an enhanced deposition rate. X-ray diffraction spectra confirmed the exclusive presence of AlN hexagonal wurtzite phase. Under a mixed gas (Ar + N(2)) pressure of 0.90 Pa and a bias voltage of -400 V. the deposited films exhibited a fairly low surface roughness of 2.23 nm. The thin films were proved higher than 75% transparent in the visible spectral region. The bonding strength between the film and substrate was verified higher than 20 N. Thus high performance of such AlN thin films can be expected in applications. (C) 2010 Elsevier B.V. All rights reserved.
部门归属	[yan, xubo; dong, yuliang; li, haiqing; gong, jun; sun, chao] chinese acad sci, inst met res, state key lab corros & protect, shenyang 110016, peoples r china.;sun, c (reprint author), chinese acad sci, inst met res, state key lab corros & protect, 72 wenhua rd, shenyang 110016, peoples r china;csun@imr.ac.cn
关键词	Filtered Arc Ion Plating Aluminum Nitride Thin Films Microstructure Deposition Rate Transmittance Growth Aln
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WOS记录号	WOS:000278148900006
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/31625
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	X. B. Yan,Y. L. Dong,H. Q. Li,et al. Synthesis of aluminum nitride thin films by filtered arc ion plating deposition[J]. Materials Letters,2010,64(11):1261-1263.
APA	X. B. Yan,Y. L. Dong,H. Q. Li,J. Gong,&C. Sun.(2010).Synthesis of aluminum nitride thin films by filtered arc ion plating deposition.Materials Letters,64(11),1261-1263.
MLA	X. B. Yan,et al."Synthesis of aluminum nitride thin films by filtered arc ion plating deposition".Materials Letters 64.11(2010):1261-1263.